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Sputtering Targets

Sputtering targets are specialized materials employed for thin-film deposition in various industries, including electronics, energy, and textiles. These targets can be composed of different elemental or alloy compositions, such as pure metals or ceramics, and are bombarded by ions, causing atoms or molecules to be ejected from their surface. These particles then deposit on a substrate to create a thin, uniform film. Different types of sputtering targets exist, including planar or rotary targets and a range of materials, such as gold, silver, titanium, and tungsten. Their selection depends on different factors like the application requirements, material properties, and compatibility with the sputtering system.
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Keyword Search:
1 – 15 of 55 results
1

Tungsten sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.95% (metals basis)

CAS: 7440-33-7 Molecular Formula: W Molecular Weight (g/mol): 183.84 MDL Number: MFCD00011461 InChI Key: WFKWXMTUELFFGS-UHFFFAOYSA-N Synonym: wolfram,ion,va,tungsten, elemental,wolframium,unii-v9306cxo6g,4+ ion,tungsten, soluble compounds,tungsten, insoluble compounds,powder PubChem CID: 23964 ChEBI: CHEBI:27998 IUPAC Name: tungsten SMILES: [W]

PubChem CID 23964
CAS 7440-33-7
Molecular Weight (g/mol) 183.84
ChEBI CHEBI:27998
MDL Number MFCD00011461
SMILES [W]
Synonym wolfram,ion,va,tungsten, elemental,wolframium,unii-v9306cxo6g,4+ ion,tungsten, soluble compounds,tungsten, insoluble compounds,powder
IUPAC Name tungsten
InChI Key WFKWXMTUELFFGS-UHFFFAOYSA-N
Molecular Formula W
2

Copper sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.995% (metals basis)

CAS: 7440-50-8 Molecular Formula: Cu Molecular Weight (g/mol): 63.55 MDL Number: MFCD00010965 InChI Key: RYGMFSIKBFXOCR-UHFFFAOYSA-N Synonym: cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer PubChem CID: 23978 ChEBI: CHEBI:30052 IUPAC Name: copper SMILES: [Cu]

PubChem CID 23978
CAS 7440-50-8
Molecular Weight (g/mol) 63.55
ChEBI CHEBI:30052
MDL Number MFCD00010965
SMILES [Cu]
Synonym cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer
IUPAC Name copper
InChI Key RYGMFSIKBFXOCR-UHFFFAOYSA-N
Molecular Formula Cu
3

Magnesium sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.95% (metals basis), Thermo Scientific Chemicals

CAS: 7439-95-4 Molecular Formula: Mg Molecular Weight (g/mol): 24.30 MDL Number: MFCD00085308 InChI Key: JLVVSXFLKOJNIY-UHFFFAOYSA-N Synonym: magnesio,sheet,powdered,magnesio italian,turnings,rieke's active,ribbon,unii-i38zp9992a,hsdb 654,nitrate, acs PubChem CID: 5462224 ChEBI: CHEBI:25107 IUPAC Name: magnesium SMILES: [Mg]

PubChem CID 5462224
CAS 7439-95-4
Molecular Weight (g/mol) 24.30
ChEBI CHEBI:25107
MDL Number MFCD00085308
SMILES [Mg]
Synonym magnesio,sheet,powdered,magnesio italian,turnings,rieke's active,ribbon,unii-i38zp9992a,hsdb 654,nitrate, acs
IUPAC Name magnesium
InChI Key JLVVSXFLKOJNIY-UHFFFAOYSA-N
Molecular Formula Mg
4

Niobium sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.95% (metals basis excluding Ta)

CAS: 3-1-7440 Molecular Formula: Nb Molecular Weight (g/mol): 92.91 MDL Number: MFCD00011126 InChI Key: GUCVJGMIXFAOAE-UHFFFAOYSA-N Synonym: columbium,element,niobium-93,powder,foil,rod,vn 1,foil, 0.25mm 0.01in thick,columbio,niobio PubChem CID: 23936 ChEBI: CHEBI:33344 IUPAC Name: niobium SMILES: [Nb]

PubChem CID 23936
CAS 3-1-7440
Molecular Weight (g/mol) 92.91
ChEBI CHEBI:33344
MDL Number MFCD00011126
SMILES [Nb]
Synonym columbium,element,niobium-93,powder,foil,rod,vn 1,foil, 0.25mm 0.01in thick,columbio,niobio
IUPAC Name niobium
InChI Key GUCVJGMIXFAOAE-UHFFFAOYSA-N
Molecular Formula Nb
5

Niobium sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.95% (metals basis excluding Ta)

CAS: 3-1-7440 Molecular Formula: Nb Molecular Weight (g/mol): 92.91 MDL Number: MFCD00011126 InChI Key: GUCVJGMIXFAOAE-UHFFFAOYSA-N Synonym: columbium,element,niobium-93,powder,foil,rod,vn 1,foil, 0.25mm 0.01in thick,columbio,niobio PubChem CID: 23936 ChEBI: CHEBI:33344 IUPAC Name: niobium SMILES: [Nb]

PubChem CID 23936
CAS 3-1-7440
Molecular Weight (g/mol) 92.91
ChEBI CHEBI:33344
MDL Number MFCD00011126
SMILES [Nb]
Synonym columbium,element,niobium-93,powder,foil,rod,vn 1,foil, 0.25mm 0.01in thick,columbio,niobio
IUPAC Name niobium
InChI Key GUCVJGMIXFAOAE-UHFFFAOYSA-N
Molecular Formula Nb
6

Aluminum sputtering target, 50.8mm (2.0 in.) dia. x 3.18mm (0.125 in.) thick, 99.999% (metals basis), Thermo Scientific Chemicals

CAS: 7429-90-5 Molecular Formula: Al Molecular Weight (g/mol): 26.98 MDL Number: MFCD00134029 InChI Key: XAGFODPZIPBFFR-UHFFFAOYSA-N Synonym: aluminum,metal,powder,aluminio,metana,adom,alumina fibre,aluminum flake,dust,noral aluminum PubChem CID: 5359268 ChEBI: CHEBI:33629 IUPAC Name: aluminum SMILES: [Al]

PubChem CID 5359268
CAS 7429-90-5
Molecular Weight (g/mol) 26.98
ChEBI CHEBI:33629
MDL Number MFCD00134029
SMILES [Al]
Synonym aluminum,metal,powder,aluminio,metana,adom,alumina fibre,aluminum flake,dust,noral aluminum
IUPAC Name aluminum
InChI Key XAGFODPZIPBFFR-UHFFFAOYSA-N
Molecular Formula Al
7

Manganese sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.95% (metals basis)

CAS: 7439-96-5 Molecular Formula: Mn Molecular Weight (g/mol): 54.94 MDL Number: MFCD00011111 InChI Key: PWHULOQIROXLJO-UHFFFAOYSA-N Synonym: colloidal,mangan,manganese, elemental,cutaval,magnacat,metal alloy,tronamang,fume,mangan polish,compounds PubChem CID: 23930 ChEBI: CHEBI:35154 IUPAC Name: manganese SMILES: [Mn]

PubChem CID 23930
CAS 7439-96-5
Molecular Weight (g/mol) 54.94
ChEBI CHEBI:35154
MDL Number MFCD00011111
SMILES [Mn]
Synonym colloidal,mangan,manganese, elemental,cutaval,magnacat,metal alloy,tronamang,fume,mangan polish,compounds
IUPAC Name manganese
InChI Key PWHULOQIROXLJO-UHFFFAOYSA-N
Molecular Formula Mn
8

Titanium sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.7% (metals basis)

CAS: 7440-32-6 Molecular Formula: Ti Molecular Weight (g/mol): 47.87 MDL Number: MFCD00011264,MFCD00151301 InChI Key: RTAQQCXQSZGOHL-UHFFFAOYSA-N Synonym: oremet,alloy,cp,vt1,c.p.,contimet 30,jistp28,titanium-125,ii hydride,titan vt 1-1 PubChem CID: 23963 ChEBI: CHEBI:33341 IUPAC Name: titanium SMILES: [Ti]

PubChem CID 23963
CAS 7440-32-6
Molecular Weight (g/mol) 47.87
ChEBI CHEBI:33341
MDL Number MFCD00011264,MFCD00151301
SMILES [Ti]
Synonym oremet,alloy,cp,vt1,c.p.,contimet 30,jistp28,titanium-125,ii hydride,titan vt 1-1
IUPAC Name titanium
InChI Key RTAQQCXQSZGOHL-UHFFFAOYSA-N
Molecular Formula Ti
9

Titanium sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.7% (metals basis)

CAS: 7440-32-6 Molecular Formula: Ti Molecular Weight (g/mol): 47.87 MDL Number: MFCD00011264,MFCD00151301 InChI Key: RTAQQCXQSZGOHL-UHFFFAOYSA-N Synonym: oremet,alloy,cp,vt1,c.p.,contimet 30,jistp28,titanium-125,ii hydride,titan vt 1-1 PubChem CID: 23963 ChEBI: CHEBI:33341 IUPAC Name: titanium SMILES: [Ti]

PubChem CID 23963
CAS 7440-32-6
Molecular Weight (g/mol) 47.87
ChEBI CHEBI:33341
MDL Number MFCD00011264,MFCD00151301
SMILES [Ti]
Synonym oremet,alloy,cp,vt1,c.p.,contimet 30,jistp28,titanium-125,ii hydride,titan vt 1-1
IUPAC Name titanium
InChI Key RTAQQCXQSZGOHL-UHFFFAOYSA-N
Molecular Formula Ti
10

Zinc oxide sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.9% (metals basis)

CAS: 1314-13-2 Molecular Formula: OZn Molecular Weight (g/mol): 81.38 MDL Number: MFCD00011300 InChI Key: XLOMVQKBTHCTTD-UHFFFAOYSA-N Synonym: zinc oxide,zinc white,amalox,permanent white,Chinese white,snow white,emanay zinc oxide,felling zinc oxide,zinc oxide zno,akro-zinc bar 85 PubChem CID: 14806 ChEBI: CHEBI:36560 IUPAC Name: oxozinc SMILES: O=[Zn]

PubChem CID 14806
CAS 1314-13-2
Molecular Weight (g/mol) 81.38
ChEBI CHEBI:36560
MDL Number MFCD00011300
SMILES O=[Zn]
Synonym zinc oxide,zinc white,amalox,permanent white,Chinese white,snow white,emanay zinc oxide,felling zinc oxide,zinc oxide zno,akro-zinc bar 85
IUPAC Name oxozinc
InChI Key XLOMVQKBTHCTTD-UHFFFAOYSA-N
Molecular Formula OZn
11

Silicon sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.999% (metals basis)

CAS: 7440-21-3 Molecular Formula: Si Molecular Weight (g/mol): 28.09 MDL Number: MFCD00085311 InChI Key: XUIMIQQOPSSXEZ-UHFFFAOYSA-N Synonym: metal,silicone,defoamer s-10,flots 100sco,powder,dust,unii-z4152n8iui,polyeristalline powder,ccris 6599,ccris 6831 PubChem CID: 5461123 ChEBI: CHEBI:27573 IUPAC Name: silicon SMILES: [Si]

PubChem CID 5461123
CAS 7440-21-3
Molecular Weight (g/mol) 28.09
ChEBI CHEBI:27573
MDL Number MFCD00085311
SMILES [Si]
Synonym metal,silicone,defoamer s-10,flots 100sco,powder,dust,unii-z4152n8iui,polyeristalline powder,ccris 6599,ccris 6831
IUPAC Name silicon
InChI Key XUIMIQQOPSSXEZ-UHFFFAOYSA-N
Molecular Formula Si
12

Titanium nitride sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.5% (metals basis)

CAS: 25583-20-4 Molecular Formula: NTi Molecular Weight (g/mol): 61.87 MDL Number: MFCD00049596 InChI Key: NRTOMJZYCJJWKI-UHFFFAOYSA-N Synonym: titanium nitride,titanium nitride tin,nitridotitanium,unii-6rw464feff,titannitrid,titaniumylidyneamine,titanium mononitride,titanium nitride, <3 mum,6rw464feff,titanium nitride tin grade a PubChem CID: 93091 IUPAC Name: azanylidynetitanium SMILES: N#[Ti]

PubChem CID 93091
CAS 25583-20-4
Molecular Weight (g/mol) 61.87
MDL Number MFCD00049596
SMILES N#[Ti]
Synonym titanium nitride,titanium nitride tin,nitridotitanium,unii-6rw464feff,titannitrid,titaniumylidyneamine,titanium mononitride,titanium nitride, <3 mum,6rw464feff,titanium nitride tin grade a
IUPAC Name azanylidynetitanium
InChI Key NRTOMJZYCJJWKI-UHFFFAOYSA-N
Molecular Formula NTi
13

Titanium nitride sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.5% (metals basis)

CAS: 25583-20-4 Molecular Formula: NTi Molecular Weight (g/mol): 61.87 MDL Number: MFCD00049596 InChI Key: NRTOMJZYCJJWKI-UHFFFAOYSA-N Synonym: titanium nitride,titanium nitride tin,nitridotitanium,unii-6rw464feff,titannitrid,titaniumylidyneamine,titanium mononitride,titanium nitride, <3 mum,6rw464feff,titanium nitride tin grade a PubChem CID: 93091 IUPAC Name: azanylidynetitanium SMILES: N#[Ti]

PubChem CID 93091
CAS 25583-20-4
Molecular Weight (g/mol) 61.87
MDL Number MFCD00049596
SMILES N#[Ti]
Synonym titanium nitride,titanium nitride tin,nitridotitanium,unii-6rw464feff,titannitrid,titaniumylidyneamine,titanium mononitride,titanium nitride, <3 mum,6rw464feff,titanium nitride tin grade a
IUPAC Name azanylidynetitanium
InChI Key NRTOMJZYCJJWKI-UHFFFAOYSA-N
Molecular Formula NTi
14

Zinc sputtering target, 76.2mm (3.0in) dia x 3.18mm (0.125in) thick, 99.99% (metals basis)

CAS: 7440-66-6 Molecular Formula: Zn Molecular Weight (g/mol): 65.38 MDL Number: MFCD00011291 InChI Key: HCHKCACWOHOZIP-UHFFFAOYSA-N Synonym: dust,cinc,powder,merrillite,rheinzink,jasad,blue powder,granular,zinc, elemental,emanay dust PubChem CID: 23994 ChEBI: CHEBI:30185 IUPAC Name: zinc SMILES: [Zn]

PubChem CID 23994
CAS 7440-66-6
Molecular Weight (g/mol) 65.38
ChEBI CHEBI:30185
MDL Number MFCD00011291
SMILES [Zn]
Synonym dust,cinc,powder,merrillite,rheinzink,jasad,blue powder,granular,zinc, elemental,emanay dust
IUPAC Name zinc
InChI Key HCHKCACWOHOZIP-UHFFFAOYSA-N
Molecular Formula Zn
15

Zinc sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.99% (metals basis)

CAS: 7440-66-6 Molecular Formula: Zn Molecular Weight (g/mol): 65.38 MDL Number: MFCD00011291 InChI Key: HCHKCACWOHOZIP-UHFFFAOYSA-N Synonym: dust,cinc,powder,merrillite,rheinzink,jasad,blue powder,granular,zinc, elemental,emanay dust PubChem CID: 23994 ChEBI: CHEBI:30185 IUPAC Name: zinc SMILES: [Zn]

PubChem CID 23994
CAS 7440-66-6
Molecular Weight (g/mol) 65.38
ChEBI CHEBI:30185
MDL Number MFCD00011291
SMILES [Zn]
Synonym dust,cinc,powder,merrillite,rheinzink,jasad,blue powder,granular,zinc, elemental,emanay dust
IUPAC Name zinc
InChI Key HCHKCACWOHOZIP-UHFFFAOYSA-N
Molecular Formula Zn