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Sputtering Targets

Sputtering targets are specialized materials employed for thin-film deposition in various industries, including electronics, energy, and textiles. These targets can be composed of different elemental or alloy compositions, such as pure metals or ceramics, and are bombarded by ions, causing atoms or molecules to be ejected from their surface. These particles then deposit on a substrate to create a thin, uniform film. Different types of sputtering targets exist, including planar or rotary targets and a range of materials, such as gold, silver, titanium, and tungsten. Their selection depends on different factors like the application requirements, material properties, and compatibility with the sputtering system.
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1 – 15 of 55 results
1

Titanium sputtering target, 76.2mm (3.0in) dia x 6.35mm (0.250in) thick, 99.995% (metals basis)

CAS: 7440-32-6 Molecular Formula: Ti Molecular Weight (g/mol): 47.87 MDL Number: MFCD00011264,MFCD00151301 InChI Key: RTAQQCXQSZGOHL-UHFFFAOYSA-N Synonym: oremet,alloy,cp,vt1,c.p.,contimet 30,jistp28,titanium-125,ii hydride,titan vt 1-1 PubChem CID: 23963 ChEBI: CHEBI:33341 IUPAC Name: titanium SMILES: [Ti]

PubChem CID 23963
CAS 7440-32-6
Molecular Weight (g/mol) 47.87
ChEBI CHEBI:33341
MDL Number MFCD00011264,MFCD00151301
SMILES [Ti]
Synonym oremet,alloy,cp,vt1,c.p.,contimet 30,jistp28,titanium-125,ii hydride,titan vt 1-1
IUPAC Name titanium
InChI Key RTAQQCXQSZGOHL-UHFFFAOYSA-N
Molecular Formula Ti
2

Copper sputtering target, 76.2mm (3.0in) dia x 3.18mm (0.125in) thick, 99.999% (metals basis)

CAS: 7440-50-8 Molecular Formula: Cu Molecular Weight (g/mol): 63.55 MDL Number: MFCD00010965 InChI Key: RYGMFSIKBFXOCR-UHFFFAOYSA-N Synonym: cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer PubChem CID: 23978 ChEBI: CHEBI:30052 IUPAC Name: copper SMILES: [Cu]

PubChem CID 23978
CAS 7440-50-8
Molecular Weight (g/mol) 63.55
ChEBI CHEBI:30052
MDL Number MFCD00010965
SMILES [Cu]
Synonym cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer
IUPAC Name copper
InChI Key RYGMFSIKBFXOCR-UHFFFAOYSA-N
Molecular Formula Cu
3

Magnesium sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.95% (metals basis), Thermo Scientific Chemicals

CAS: 7439-95-4 Molecular Formula: Mg Molecular Weight (g/mol): 24.30 MDL Number: MFCD00085308 InChI Key: JLVVSXFLKOJNIY-UHFFFAOYSA-N Synonym: magnesio,sheet,powdered,magnesio italian,turnings,rieke's active,ribbon,unii-i38zp9992a,hsdb 654,nitrate, acs PubChem CID: 5462224 ChEBI: CHEBI:25107 IUPAC Name: magnesium SMILES: [Mg]

PubChem CID 5462224
CAS 7439-95-4
Molecular Weight (g/mol) 24.30
ChEBI CHEBI:25107
MDL Number MFCD00085308
SMILES [Mg]
Synonym magnesio,sheet,powdered,magnesio italian,turnings,rieke's active,ribbon,unii-i38zp9992a,hsdb 654,nitrate, acs
IUPAC Name magnesium
InChI Key JLVVSXFLKOJNIY-UHFFFAOYSA-N
Molecular Formula Mg
4

Tungsten sputtering target, 76.2mm (3.0in) dia x 6.35mm (0.250in) thick, 99.95% (metals basis)

CAS: 7440-33-7 Molecular Formula: W Molecular Weight (g/mol): 183.84 MDL Number: MFCD00011461 InChI Key: WFKWXMTUELFFGS-UHFFFAOYSA-N Synonym: wolfram,ion,va,tungsten, elemental,wolframium,unii-v9306cxo6g,4+ ion,tungsten, soluble compounds,tungsten, insoluble compounds,powder PubChem CID: 23964 ChEBI: CHEBI:27998 IUPAC Name: tungsten SMILES: [W]

PubChem CID 23964
CAS 7440-33-7
Molecular Weight (g/mol) 183.84
ChEBI CHEBI:27998
MDL Number MFCD00011461
SMILES [W]
Synonym wolfram,ion,va,tungsten, elemental,wolframium,unii-v9306cxo6g,4+ ion,tungsten, soluble compounds,tungsten, insoluble compounds,powder
IUPAC Name tungsten
InChI Key WFKWXMTUELFFGS-UHFFFAOYSA-N
Molecular Formula W
5

Nickel sputtering target, 76.2mm (3.0in) dia x 3.18mm (0.125in) thick, 99.99% (metals basis)

CAS: 7440-02-0 Molecular Formula: Ni Molecular Weight (g/mol): 58.69 MDL Number: MFCD00011137 MFCD06798735 InChI Key: PXHVJJICTQNCMI-UHFFFAOYSA-N Synonym: raney alloy,fibrex,catalyst,particles,fibrex p,nickel, elemental,nichel italian,nickel, soluble salts,carbonyl powder,niccolum PubChem CID: 935 ChEBI: CHEBI:28112 IUPAC Name: nickel SMILES: [Ni]

PubChem CID 935
CAS 7440-02-0
Molecular Weight (g/mol) 58.69
ChEBI CHEBI:28112
MDL Number MFCD00011137 MFCD06798735
SMILES [Ni]
Synonym raney alloy,fibrex,catalyst,particles,fibrex p,nickel, elemental,nichel italian,nickel, soluble salts,carbonyl powder,niccolum
IUPAC Name nickel
InChI Key PXHVJJICTQNCMI-UHFFFAOYSA-N
Molecular Formula Ni
6

Copper sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.995% (metals basis)

CAS: 7440-50-8 Molecular Formula: Cu Molecular Weight (g/mol): 63.55 MDL Number: MFCD00010965 InChI Key: RYGMFSIKBFXOCR-UHFFFAOYSA-N Synonym: cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer PubChem CID: 23978 ChEBI: CHEBI:30052 IUPAC Name: copper SMILES: [Cu]

PubChem CID 23978
CAS 7440-50-8
Molecular Weight (g/mol) 63.55
ChEBI CHEBI:30052
MDL Number MFCD00010965
SMILES [Cu]
Synonym cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer
IUPAC Name copper
InChI Key RYGMFSIKBFXOCR-UHFFFAOYSA-N
Molecular Formula Cu
7

Chromium sputtering target, 76.2mm (3.0in) dia x 6.35mm (0.250in) thick, 99.95% (metals basis)

CAS: 7440-47-3 Molecular Formula: Cr Molecular Weight (g/mol): 52.00 MDL Number: MFCD00010944 InChI Key: VYZAMTAEIAYCRO-UHFFFAOYSA-N Synonym: chrom,chrome,cromo,metal,chrome french,compounds,chrom german,chromium, elemental,chromium, metal,ccris 159 PubChem CID: 23976 ChEBI: CHEBI:28073 IUPAC Name: chromium SMILES: [Cr]

PubChem CID 23976
CAS 7440-47-3
Molecular Weight (g/mol) 52.00
ChEBI CHEBI:28073
MDL Number MFCD00010944
SMILES [Cr]
Synonym chrom,chrome,cromo,metal,chrome french,compounds,chrom german,chromium, elemental,chromium, metal,ccris 159
IUPAC Name chromium
InChI Key VYZAMTAEIAYCRO-UHFFFAOYSA-N
Molecular Formula Cr
8

Manganese sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.95% (metals basis)

CAS: 7439-96-5 Molecular Formula: Mn Molecular Weight (g/mol): 54.94 MDL Number: MFCD00011111 InChI Key: PWHULOQIROXLJO-UHFFFAOYSA-N Synonym: colloidal,mangan,manganese, elemental,cutaval,magnacat,metal alloy,tronamang,fume,mangan polish,compounds PubChem CID: 23930 ChEBI: CHEBI:35154 IUPAC Name: manganese SMILES: [Mn]

PubChem CID 23930
CAS 7439-96-5
Molecular Weight (g/mol) 54.94
ChEBI CHEBI:35154
MDL Number MFCD00011111
SMILES [Mn]
Synonym colloidal,mangan,manganese, elemental,cutaval,magnacat,metal alloy,tronamang,fume,mangan polish,compounds
IUPAC Name manganese
InChI Key PWHULOQIROXLJO-UHFFFAOYSA-N
Molecular Formula Mn
9

Molybdenum sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.95% (metals basis)

CAS: 7439-98-7 Molecular Formula: Mo Molecular Weight (g/mol): 95.95 MDL Number: MFCD00003465 InChI Key: ZOKXTWBITQBERF-UHFFFAOYSA-N Synonym: molybdenum, elemental,6+ ion,mchvl,vi ion,molybdenum, metallic,metco 63,atom,molybdenum, ion 6+,tsm1,amperit 106.2 PubChem CID: 23932 ChEBI: CHEBI:28685 IUPAC Name: molybdenum SMILES: [Mo]

PubChem CID 23932
CAS 7439-98-7
Molecular Weight (g/mol) 95.95
ChEBI CHEBI:28685
MDL Number MFCD00003465
SMILES [Mo]
Synonym molybdenum, elemental,6+ ion,mchvl,vi ion,molybdenum, metallic,metco 63,atom,molybdenum, ion 6+,tsm1,amperit 106.2
IUPAC Name molybdenum
InChI Key ZOKXTWBITQBERF-UHFFFAOYSA-N
Molecular Formula Mo
10

Tungsten sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.95% (metals basis)

CAS: 7440-33-7 Molecular Formula: W Molecular Weight (g/mol): 183.84 MDL Number: MFCD00011461 InChI Key: WFKWXMTUELFFGS-UHFFFAOYSA-N Synonym: wolfram,ion,va,tungsten, elemental,wolframium,unii-v9306cxo6g,4+ ion,tungsten, soluble compounds,tungsten, insoluble compounds,powder PubChem CID: 23964 ChEBI: CHEBI:27998 IUPAC Name: tungsten SMILES: [W]

PubChem CID 23964
CAS 7440-33-7
Molecular Weight (g/mol) 183.84
ChEBI CHEBI:27998
MDL Number MFCD00011461
SMILES [W]
Synonym wolfram,ion,va,tungsten, elemental,wolframium,unii-v9306cxo6g,4+ ion,tungsten, soluble compounds,tungsten, insoluble compounds,powder
IUPAC Name tungsten
InChI Key WFKWXMTUELFFGS-UHFFFAOYSA-N
Molecular Formula W
11

Aluminum sputtering target, 76.2mm (3.0 in.) dia. x 3.18mm (0.125 in.) thick, 99.999% (metals basis), Thermo Scientific Chemicals

CAS: 7429-90-5 Molecular Formula: Al Molecular Weight (g/mol): 26.98 MDL Number: MFCD00134029 InChI Key: XAGFODPZIPBFFR-UHFFFAOYSA-N Synonym: aluminum,metal,powder,aluminio,metana,adom,alumina fibre,aluminum flake,dust,noral aluminum PubChem CID: 5359268 ChEBI: CHEBI:33629 IUPAC Name: aluminum SMILES: [Al]

PubChem CID 5359268
CAS 7429-90-5
Molecular Weight (g/mol) 26.98
ChEBI CHEBI:33629
MDL Number MFCD00134029
SMILES [Al]
Synonym aluminum,metal,powder,aluminio,metana,adom,alumina fibre,aluminum flake,dust,noral aluminum
IUPAC Name aluminum
InChI Key XAGFODPZIPBFFR-UHFFFAOYSA-N
Molecular Formula Al
12

Titanium sputtering target, 76.2mm (3.0in) dia x 3.18mm (0.125in) thick, 99.995% (metals basis)

CAS: 7440-32-6 Molecular Formula: Ti Molecular Weight (g/mol): 47.87 MDL Number: MFCD00011264,MFCD00151301 InChI Key: RTAQQCXQSZGOHL-UHFFFAOYSA-N Synonym: oremet,alloy,cp,vt1,c.p.,contimet 30,jistp28,titanium-125,ii hydride,titan vt 1-1 PubChem CID: 23963 ChEBI: CHEBI:33341 IUPAC Name: titanium SMILES: [Ti]

PubChem CID 23963
CAS 7440-32-6
Molecular Weight (g/mol) 47.87
ChEBI CHEBI:33341
MDL Number MFCD00011264,MFCD00151301
SMILES [Ti]
Synonym oremet,alloy,cp,vt1,c.p.,contimet 30,jistp28,titanium-125,ii hydride,titan vt 1-1
IUPAC Name titanium
InChI Key RTAQQCXQSZGOHL-UHFFFAOYSA-N
Molecular Formula Ti
13

Zinc sputtering target, 76.2mm (3.0in) dia x 3.18mm (0.125in) thick, 99.99% (metals basis)

CAS: 7440-66-6 Molecular Formula: Zn Molecular Weight (g/mol): 65.38 MDL Number: MFCD00011291 InChI Key: HCHKCACWOHOZIP-UHFFFAOYSA-N Synonym: dust,cinc,powder,merrillite,rheinzink,jasad,blue powder,granular,zinc, elemental,emanay dust PubChem CID: 23994 ChEBI: CHEBI:30185 IUPAC Name: zinc SMILES: [Zn]

PubChem CID 23994
CAS 7440-66-6
Molecular Weight (g/mol) 65.38
ChEBI CHEBI:30185
MDL Number MFCD00011291
SMILES [Zn]
Synonym dust,cinc,powder,merrillite,rheinzink,jasad,blue powder,granular,zinc, elemental,emanay dust
IUPAC Name zinc
InChI Key HCHKCACWOHOZIP-UHFFFAOYSA-N
Molecular Formula Zn
14

Zinc sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.99% (metals basis)

CAS: 7440-66-6 Molecular Formula: Zn Molecular Weight (g/mol): 65.38 MDL Number: MFCD00011291 InChI Key: HCHKCACWOHOZIP-UHFFFAOYSA-N Synonym: dust,cinc,powder,merrillite,rheinzink,jasad,blue powder,granular,zinc, elemental,emanay dust PubChem CID: 23994 ChEBI: CHEBI:30185 IUPAC Name: zinc SMILES: [Zn]

PubChem CID 23994
CAS 7440-66-6
Molecular Weight (g/mol) 65.38
ChEBI CHEBI:30185
MDL Number MFCD00011291
SMILES [Zn]
Synonym dust,cinc,powder,merrillite,rheinzink,jasad,blue powder,granular,zinc, elemental,emanay dust
IUPAC Name zinc
InChI Key HCHKCACWOHOZIP-UHFFFAOYSA-N
Molecular Formula Zn
15

Molybdenum sputtering target, 76.2mm (3.0in) dia x 6.35mm (0.250in) thick, 99.95% (metals basis)

CAS: 7439-98-7 Molecular Formula: Mo Molecular Weight (g/mol): 95.95 MDL Number: MFCD00003465 InChI Key: ZOKXTWBITQBERF-UHFFFAOYSA-N Synonym: molybdenum, elemental,6+ ion,mchvl,vi ion,molybdenum, metallic,metco 63,atom,molybdenum, ion 6+,tsm1,amperit 106.2 PubChem CID: 23932 ChEBI: CHEBI:28685 IUPAC Name: molybdenum SMILES: [Mo]

PubChem CID 23932
CAS 7439-98-7
Molecular Weight (g/mol) 95.95
ChEBI CHEBI:28685
MDL Number MFCD00003465
SMILES [Mo]
Synonym molybdenum, elemental,6+ ion,mchvl,vi ion,molybdenum, metallic,metco 63,atom,molybdenum, ion 6+,tsm1,amperit 106.2
IUPAC Name molybdenum
InChI Key ZOKXTWBITQBERF-UHFFFAOYSA-N
Molecular Formula Mo