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Sputtering Targets

Sputtering targets are specialized materials employed for thin-film deposition in various industries, including electronics, energy, and textiles. These targets can be composed of different elemental or alloy compositions, such as pure metals or ceramics, and are bombarded by ions, causing atoms or molecules to be ejected from their surface. These particles then deposit on a substrate to create a thin, uniform film. Different types of sputtering targets exist, including planar or rotary targets and a range of materials, such as gold, silver, titanium, and tungsten. Their selection depends on different factors like the application requirements, material properties, and compatibility with the sputtering system.
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1 – 15 of 55 results
1

Titanium sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.7% (metals basis)

CAS: 7440-32-6 Molecular Formula: Ti Molecular Weight (g/mol): 47.87 MDL Number: MFCD00011264,MFCD00151301 InChI Key: RTAQQCXQSZGOHL-UHFFFAOYSA-N Synonym: oremet,alloy,cp,vt1,c.p.,contimet 30,jistp28,titanium-125,ii hydride,titan vt 1-1 PubChem CID: 23963 ChEBI: CHEBI:33341 IUPAC Name: titanium SMILES: [Ti]

PubChem CID 23963
CAS 7440-32-6
Molecular Weight (g/mol) 47.87
ChEBI CHEBI:33341
MDL Number MFCD00011264,MFCD00151301
SMILES [Ti]
Synonym oremet,alloy,cp,vt1,c.p.,contimet 30,jistp28,titanium-125,ii hydride,titan vt 1-1
IUPAC Name titanium
InChI Key RTAQQCXQSZGOHL-UHFFFAOYSA-N
Molecular Formula Ti
2

Silicon(II) oxide sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.9% (metals basis)

CAS: 10097-28-6 Molecular Formula: OSi Molecular Weight (g/mol): 44.084 MDL Number: MFCD00151536 InChI Key: LIVNPJMFVYWSIS-UHFFFAOYSA-N Synonym: silicon monoxide,silylene, oxo,silicon ii oxide,unii-1oqn9cbg7l,1oqn9cbg7l,silicon ii oxide, optical grade,sio,oxidosilicon,oxosilanylidene,oxosilylene PubChem CID: 66241 ChEBI: CHEBI:30588 IUPAC Name: oxoniumylidynesilanide SMILES: [O+]#[Si-]

PubChem CID 66241
CAS 10097-28-6
Molecular Weight (g/mol) 44.084
ChEBI CHEBI:30588
MDL Number MFCD00151536
SMILES [O+]#[Si-]
Synonym silicon monoxide,silylene, oxo,silicon ii oxide,unii-1oqn9cbg7l,1oqn9cbg7l,silicon ii oxide, optical grade,sio,oxidosilicon,oxosilanylidene,oxosilylene
IUPAC Name oxoniumylidynesilanide
InChI Key LIVNPJMFVYWSIS-UHFFFAOYSA-N
Molecular Formula OSi
3

Titanium nitride sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.5% (metals basis)

CAS: 25583-20-4 Molecular Formula: NTi Molecular Weight (g/mol): 61.87 MDL Number: MFCD00049596 InChI Key: NRTOMJZYCJJWKI-UHFFFAOYSA-N Synonym: titanium nitride,titanium nitride tin,nitridotitanium,unii-6rw464feff,titannitrid,titaniumylidyneamine,titanium mononitride,titanium nitride, <3 mum,6rw464feff,titanium nitride tin grade a PubChem CID: 93091 IUPAC Name: azanylidynetitanium SMILES: N#[Ti]

PubChem CID 93091
CAS 25583-20-4
Molecular Weight (g/mol) 61.87
MDL Number MFCD00049596
SMILES N#[Ti]
Synonym titanium nitride,titanium nitride tin,nitridotitanium,unii-6rw464feff,titannitrid,titaniumylidyneamine,titanium mononitride,titanium nitride, <3 mum,6rw464feff,titanium nitride tin grade a
IUPAC Name azanylidynetitanium
InChI Key NRTOMJZYCJJWKI-UHFFFAOYSA-N
Molecular Formula NTi
4

Nickel Chromium, sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.95% (metals basis)

CAS: 11106-97-1 Molecular Formula: CrNi Molecular Weight (g/mol): 110.69 MDL Number: MFCD00673110 InChI Key: VNNRSPGTAMTISX-UHFFFAOYSA-N Synonym: nickel chromium,nickel-chromium,nicr,nickel chromium lump,chromium, compd. with nickel 1:1,chromium nickel,acmc-1byoe,nickel chromium powder,-140+325 mesh,nickel chromium wire, 1.0mm 0.04in dia,nickel chromium wire, 0.25mm 0.01in dia PubChem CID: 11320920 IUPAC Name: chromium;nickel SMILES: [Cr].[Ni]

PubChem CID 11320920
CAS 11106-97-1
Molecular Weight (g/mol) 110.69
MDL Number MFCD00673110
SMILES [Cr].[Ni]
Synonym nickel chromium,nickel-chromium,nicr,nickel chromium lump,chromium, compd. with nickel 1:1,chromium nickel,acmc-1byoe,nickel chromium powder,-140+325 mesh,nickel chromium wire, 1.0mm 0.04in dia,nickel chromium wire, 0.25mm 0.01in dia
IUPAC Name chromium;nickel
InChI Key VNNRSPGTAMTISX-UHFFFAOYSA-N
Molecular Formula CrNi
5

Iron sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.95% (metals basis)

CAS: 7439-89-6 Molecular Formula: Fe Molecular Weight (g/mol): 55.85 MDL Number: MFCD00010999 InChI Key: XEEYBQQBJWHFJM-UHFFFAOYSA-N Synonym: ferrum,iron, elemental,ferrous,remko,armco,ferrovac,hoeganaes eh,3zhp,ancor b,atomiron 5m PubChem CID: 23925 ChEBI: CHEBI:82664 IUPAC Name: iron SMILES: [Fe]

PubChem CID 23925
CAS 7439-89-6
Molecular Weight (g/mol) 55.85
ChEBI CHEBI:82664
MDL Number MFCD00010999
SMILES [Fe]
Synonym ferrum,iron, elemental,ferrous,remko,armco,ferrovac,hoeganaes eh,3zhp,ancor b,atomiron 5m
IUPAC Name iron
InChI Key XEEYBQQBJWHFJM-UHFFFAOYSA-N
Molecular Formula Fe
6

Molybdenum sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.95% (metals basis)

CAS: 7439-98-7 Molecular Formula: Mo Molecular Weight (g/mol): 95.95 MDL Number: MFCD00003465 InChI Key: ZOKXTWBITQBERF-UHFFFAOYSA-N Synonym: molybdenum, elemental,6+ ion,mchvl,vi ion,molybdenum, metallic,metco 63,atom,molybdenum, ion 6+,tsm1,amperit 106.2 PubChem CID: 23932 ChEBI: CHEBI:28685 IUPAC Name: molybdenum SMILES: [Mo]

PubChem CID 23932
CAS 7439-98-7
Molecular Weight (g/mol) 95.95
ChEBI CHEBI:28685
MDL Number MFCD00003465
SMILES [Mo]
Synonym molybdenum, elemental,6+ ion,mchvl,vi ion,molybdenum, metallic,metco 63,atom,molybdenum, ion 6+,tsm1,amperit 106.2
IUPAC Name molybdenum
InChI Key ZOKXTWBITQBERF-UHFFFAOYSA-N
Molecular Formula Mo
7

Nickel sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.99% (metals basis)

CAS: 7440-02-0 Molecular Formula: Ni Molecular Weight (g/mol): 58.69 MDL Number: MFCD00011137 MFCD06798735 InChI Key: PXHVJJICTQNCMI-UHFFFAOYSA-N Synonym: raney alloy,fibrex,catalyst,particles,fibrex p,nickel, elemental,nichel italian,nickel, soluble salts,carbonyl powder,niccolum PubChem CID: 935 ChEBI: CHEBI:28112 IUPAC Name: nickel SMILES: [Ni]

PubChem CID 935
CAS 7440-02-0
Molecular Weight (g/mol) 58.69
ChEBI CHEBI:28112
MDL Number MFCD00011137 MFCD06798735
SMILES [Ni]
Synonym raney alloy,fibrex,catalyst,particles,fibrex p,nickel, elemental,nichel italian,nickel, soluble salts,carbonyl powder,niccolum
IUPAC Name nickel
InChI Key PXHVJJICTQNCMI-UHFFFAOYSA-N
Molecular Formula Ni
8

Titanium sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.7% (metals basis)

CAS: 7440-32-6 Molecular Formula: Ti Molecular Weight (g/mol): 47.87 MDL Number: MFCD00011264,MFCD00151301 InChI Key: RTAQQCXQSZGOHL-UHFFFAOYSA-N Synonym: oremet,alloy,cp,vt1,c.p.,contimet 30,jistp28,titanium-125,ii hydride,titan vt 1-1 PubChem CID: 23963 ChEBI: CHEBI:33341 IUPAC Name: titanium SMILES: [Ti]

PubChem CID 23963
CAS 7440-32-6
Molecular Weight (g/mol) 47.87
ChEBI CHEBI:33341
MDL Number MFCD00011264,MFCD00151301
SMILES [Ti]
Synonym oremet,alloy,cp,vt1,c.p.,contimet 30,jistp28,titanium-125,ii hydride,titan vt 1-1
IUPAC Name titanium
InChI Key RTAQQCXQSZGOHL-UHFFFAOYSA-N
Molecular Formula Ti
9

Zinc oxide sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.9% (metals basis)

CAS: 1314-13-2 Molecular Formula: OZn Molecular Weight (g/mol): 81.38 MDL Number: MFCD00011300 InChI Key: XLOMVQKBTHCTTD-UHFFFAOYSA-N Synonym: zinc oxide,zinc white,amalox,permanent white,Chinese white,snow white,emanay zinc oxide,felling zinc oxide,zinc oxide zno,akro-zinc bar 85 PubChem CID: 14806 ChEBI: CHEBI:36560 IUPAC Name: oxozinc SMILES: O=[Zn]

PubChem CID 14806
CAS 1314-13-2
Molecular Weight (g/mol) 81.38
ChEBI CHEBI:36560
MDL Number MFCD00011300
SMILES O=[Zn]
Synonym zinc oxide,zinc white,amalox,permanent white,Chinese white,snow white,emanay zinc oxide,felling zinc oxide,zinc oxide zno,akro-zinc bar 85
IUPAC Name oxozinc
InChI Key XLOMVQKBTHCTTD-UHFFFAOYSA-N
Molecular Formula OZn
10

Tungsten sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.95% (metals basis)

CAS: 7440-33-7 Molecular Formula: W Molecular Weight (g/mol): 183.84 MDL Number: MFCD00011461 InChI Key: WFKWXMTUELFFGS-UHFFFAOYSA-N Synonym: wolfram,ion,va,tungsten, elemental,wolframium,unii-v9306cxo6g,4+ ion,tungsten, soluble compounds,tungsten, insoluble compounds,powder PubChem CID: 23964 ChEBI: CHEBI:27998 IUPAC Name: tungsten SMILES: [W]

PubChem CID 23964
CAS 7440-33-7
Molecular Weight (g/mol) 183.84
ChEBI CHEBI:27998
MDL Number MFCD00011461
SMILES [W]
Synonym wolfram,ion,va,tungsten, elemental,wolframium,unii-v9306cxo6g,4+ ion,tungsten, soluble compounds,tungsten, insoluble compounds,powder
IUPAC Name tungsten
InChI Key WFKWXMTUELFFGS-UHFFFAOYSA-N
Molecular Formula W
11

Zinc sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.99% (metals basis)

CAS: 7440-66-6 Molecular Formula: Zn Molecular Weight (g/mol): 65.38 MDL Number: MFCD00011291 InChI Key: HCHKCACWOHOZIP-UHFFFAOYSA-N Synonym: dust,cinc,powder,merrillite,rheinzink,jasad,blue powder,granular,zinc, elemental,emanay dust PubChem CID: 23994 ChEBI: CHEBI:30185 IUPAC Name: zinc SMILES: [Zn]

PubChem CID 23994
CAS 7440-66-6
Molecular Weight (g/mol) 65.38
ChEBI CHEBI:30185
MDL Number MFCD00011291
SMILES [Zn]
Synonym dust,cinc,powder,merrillite,rheinzink,jasad,blue powder,granular,zinc, elemental,emanay dust
IUPAC Name zinc
InChI Key HCHKCACWOHOZIP-UHFFFAOYSA-N
Molecular Formula Zn
12

Copper sputtering target, 76.2mm (3.0in) dia x 3.18mm (0.125in) thick, 99.999% (metals basis)

CAS: 7440-50-8 Molecular Formula: Cu Molecular Weight (g/mol): 63.55 MDL Number: MFCD00010965 InChI Key: RYGMFSIKBFXOCR-UHFFFAOYSA-N Synonym: cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer PubChem CID: 23978 ChEBI: CHEBI:30052 IUPAC Name: copper SMILES: [Cu]

PubChem CID 23978
CAS 7440-50-8
Molecular Weight (g/mol) 63.55
ChEBI CHEBI:30052
MDL Number MFCD00010965
SMILES [Cu]
Synonym cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer
IUPAC Name copper
InChI Key RYGMFSIKBFXOCR-UHFFFAOYSA-N
Molecular Formula Cu
13

Chromium sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.95% (metals basis)

CAS: 7440-47-3 Molecular Formula: Cr Molecular Weight (g/mol): 52.00 MDL Number: MFCD00010944 InChI Key: VYZAMTAEIAYCRO-UHFFFAOYSA-N Synonym: chrom,chrome,cromo,metal,chrome french,compounds,chrom german,chromium, elemental,chromium, metal,ccris 159 PubChem CID: 23976 ChEBI: CHEBI:28073 IUPAC Name: chromium SMILES: [Cr]

PubChem CID 23976
CAS 7440-47-3
Molecular Weight (g/mol) 52.00
ChEBI CHEBI:28073
MDL Number MFCD00010944
SMILES [Cr]
Synonym chrom,chrome,cromo,metal,chrome french,compounds,chrom german,chromium, elemental,chromium, metal,ccris 159
IUPAC Name chromium
InChI Key VYZAMTAEIAYCRO-UHFFFAOYSA-N
Molecular Formula Cr
14

Zinc sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.99% (metals basis)

CAS: 7440-66-6 Molecular Formula: Zn Molecular Weight (g/mol): 65.38 MDL Number: MFCD00011291 InChI Key: HCHKCACWOHOZIP-UHFFFAOYSA-N Synonym: dust,cinc,powder,merrillite,rheinzink,jasad,blue powder,granular,zinc, elemental,emanay dust PubChem CID: 23994 ChEBI: CHEBI:30185 IUPAC Name: zinc SMILES: [Zn]

PubChem CID 23994
CAS 7440-66-6
Molecular Weight (g/mol) 65.38
ChEBI CHEBI:30185
MDL Number MFCD00011291
SMILES [Zn]
Synonym dust,cinc,powder,merrillite,rheinzink,jasad,blue powder,granular,zinc, elemental,emanay dust
IUPAC Name zinc
InChI Key HCHKCACWOHOZIP-UHFFFAOYSA-N
Molecular Formula Zn
15

Zinc sputtering target, 76.2mm (3.0in) dia x 3.18mm (0.125in) thick, 99.99% (metals basis)

CAS: 7440-66-6 Molecular Formula: Zn Molecular Weight (g/mol): 65.38 MDL Number: MFCD00011291 InChI Key: HCHKCACWOHOZIP-UHFFFAOYSA-N Synonym: dust,cinc,powder,merrillite,rheinzink,jasad,blue powder,granular,zinc, elemental,emanay dust PubChem CID: 23994 ChEBI: CHEBI:30185 IUPAC Name: zinc SMILES: [Zn]

PubChem CID 23994
CAS 7440-66-6
Molecular Weight (g/mol) 65.38
ChEBI CHEBI:30185
MDL Number MFCD00011291
SMILES [Zn]
Synonym dust,cinc,powder,merrillite,rheinzink,jasad,blue powder,granular,zinc, elemental,emanay dust
IUPAC Name zinc
InChI Key HCHKCACWOHOZIP-UHFFFAOYSA-N
Molecular Formula Zn