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Foamtec UltraSOLV™ ScrubPADS™

Vacuum Chamber Cleaning ScrubPADS with 180-1350 Diamond grit abrasive particles for light to heavy duty PM procedures

$75.80 - $4,366.43

Specifications

For Use With (Application) Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear
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Products ${productFamilyLength}
Catalog Number Mfr. No. Grit Includes Material Price Quantity  
Catalog Number Mfr. No. Grit Includes Material Price Quantity  
19-042-108 Foamtec
HT451810
180 Without slit Silicone Carbide Pack of 10 Each for $90.16
Case of 50 Pack for $3,767.00
19-041-777 Foamtec
HT4513PD10
1350 Without slit Diamond Pack of 10 Each for $558.17
Case of 10 Pack for $5,007.20
19-042-110 Foamtec
HT452210
220 Without slit Silicone Carbide Pack of 10 Each for $75.80
Case of 50 Pack for $3,167.00
19-042-111 Foamtec
HT452810
280 Without slit Silicone Carbide Pack of 10 Each for $75.80
Case of 50 Pack for $3,167.00
19-042-113 Foamtec
HT456010
600 Without slit Silicone Carbide Pack of 10 Each for $75.80
Case of 50 Pack for $3,167.00
19-042-418 Foamtec
HT4540S10
400 Slit Silicone Carbide Case of 500 Each for $4,366.43
19-120-2278 Foamtec
HT4528D10
280 Without slit Diamond Pack of 10 Each for $495.64
Case of 10 Pack for $4,446.20
19-042-106 Foamtec
HT451010
100 Without slit Silicone Carbide Pack of 10 Each for $75.80
Case of 50 Pack for $3,167.00
19-120-2280 Foamtec
HT4536D10
360 Without slit Diamond Pack of 10 Each for $517.42
Case of 10 Pack for $4,641.60
19-304-796 Foamtec
HT4580D811
800 Without slit Diamond Case of 25 Each for $578.08
19-304-798 Foamtec
HT4580D831
800 Without slit Diamond Case of 25 Each for $340.00
19-304-740 Foamtec
HT4520PD10
2000 Without slit Diamond Pack of 10 Each for $558.43
Case of 10 Pack for $5,009.50
19-304-791 Foamtec
HT4528D821
280 Without slit Diamond Case of 25 Each for $442.05
19-304-790 Foamtec
HT4528D811
280 Without slit Diamond Case of 25 Each for $578.08
19-304-792 Foamtec
HT4528D831
280 Without slit Diamond Case of 25 Each for $340.00
19-304-793 Foamtec
HT4536D811
360 Without slit Diamond Case of 25 Each for $578.06
19-304-794 Foamtec
HT4536D821
360 Without slit Diamond Case of 25 Each for $442.04
19-304-795 Foamtec
HT4536D831
360 Without slit Diamond Case of 25 Each for $340.00
19-304-741 Foamtec
HT4530PD10
3000 Without slit Diamond Pack of 10 Each for $524.41
Case of 10 Pack for $4,598.80
Specifications

Description

Ideal for wafer processing tools such as LAM 9600 and 2300 Etch chambers, Hitachi Etch chambers, TEL Etch Chambers, Varian Ion Implant Process Areas, Novellus Speed, AMAT TxZ, WxZ, DxZ, SinGEN, PolyGEN, Endura and Producer CVD, PVD tools and Roth and Rau SiNX CVD tools.

  • Wide grit selection allows for quick removal of process-induced residue from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear
  • Fiber-free construction reduces particle levels in cleaned tools
  • Unique bonding technology minimizes the release of abrasive particles leading to cleaner PM procedures
  • Enables the elimination of H2O2 from PMs, which greatly reduces recovery times

Description & Specifications

Specifications

Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear