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Foamtec UltraSOLV™ ScrubPADS™
Vacuum Chamber Cleaning ScrubPADS for light to heavy duty PM procedures
$81.96 - $1,010.15
Specifications
| For Use With (Application) | Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear |
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| Catalog Number | Mfr. No. | Grit | Includes | Material | Length (Metric) | Price | Quantity & Availability | ||
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| Catalog Number | Mfr. No. | Grit | Includes | Material | Length (Metric) | Price | Quantity & Availability | ||
19041777
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Foamtec
HT4513PD10 |
1350 | Without slit | Diamond | 10.16 cm |
Pack of 10 Each for $1,010.15
Case of 10 Pack for $8,637.70
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19042110
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Foamtec
HT452210 |
220 | Without slit | Silicone Carbide | 10.16 cm |
Pack of 10 Each for $125.94
Case of 50 Pack for $5,384.50
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191202183
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Foamtec
HT4528D101 |
280 | Without slit | Diamond | 10.16 cm |
Each for $81.96
Case of 100 Each for $6,811.00
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19304798
|
Foamtec
HT4580D83 1 |
800 | Without slit | Diamond | 5.72 cm |
Case of 25 Each for $597.25
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Description
Ideal for wafer processing tools such as LAM 9600 and 2300 Etch chambers, Hitachi Etch chambers, TEL Etch Chambers, Varian Ion Implant Process Areas, Novellus Speed, AMAT TxZ, WxZ, DxZ, SinGEN, PolyGEN, Endura and Producer CVD, PVD tools and Roth and Rau SiNX CVD tools.
- Wide grit selection allows for quick removal of process-induced residue from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear
- Fiber-free construction reduces particle levels in cleaned tools
- Unique bonding technology minimizes the release of abrasive particles leading to cleaner PM procedures
- Enables the elimination of H2O2 from PMs, which greatly reduces recovery times
Specifications
| Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear |