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Foamtec UltraSOLV™ ScrubPADS™

Vacuum Chamber Cleaning ScrubPADS with 180-1350 Diamond grit abrasive particles for light to heavy duty PM procedures

$74.74 - $4,304.93

Specifications

For Use With (Application) Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear
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Products
Catalog Number Mfr. No. Grit Includes Material Price Quantity    

19-042-108

 
foamtec
HT451810
180 Without slit Silicone Carbide Pack of 10 Each for $88.90
Case of 50 Pack for $3,714.50

19-041-777

 
foamtec
HT4513PD10
1350 Without slit Diamond Pack of 10 Each for $550.31
Case of 10 Pack for $4,936.70

19-042-110

 
foamtec
HT452210
220 Without slit Silicone Carbide Pack of 10 Each for $74.74
Case of 50 Pack for $3,122.50

19-042-111

 
foamtec
HT452810
280 Without slit Silicone Carbide Pack of 10 Each for $74.74
Case of 50 Pack for $3,122.50

19-042-113

 
foamtec
HT456010
600 Without slit Silicone Carbide Pack of 10 Each for $74.74
Case of 50 Pack for $3,122.50

19-042-418

 
foamtec
HT4540S-10
400 Slit Silicone Carbide Case of 500 Each for $4,304.93

19-120-2278

 
foamtec
HT4528D-10
280 Without slit Diamond Pack of 10 Each for $488.65
Case of 10 Pack for $4,383.60

19-042-106

 
foamtec
HT451010
100 Without slit Silicone Carbide Pack of 10 Each for $74.74
Case of 50 Pack for $3,122.50

19-120-2280

 
foamtec
HT4536D-10
360 Without slit Diamond Pack of 10 Each for $510.14
Case of 10 Pack for $4,576.30

19-304-796

 
foamtec
HT4580D81-1
800 Without slit Diamond Case of 25 Each for $569.95

19-304-797

 
foamtec
HT4580D82-1
800 Without slit Diamond Case of 25 Each for $435.81

19-304-798

 
foamtec
HT4580D83-1
800 Without slit Diamond Case of 25 Each for $335.22

19-304-740

 
foamtec
HT4520PD-10
2000 Without slit Diamond Pack of 10 Each for $550.56
Case of 10 Pack for $4,938.90

19-304-791

 
foamtec
HT4528D82-1
280 Without slit Diamond Case of 25 Each for $435.83

19-304-790

 
foamtec
HT4528D81-1
280 Without slit Diamond Case of 25 Each for $569.95

19-304-792

 
foamtec
HT4528D83-1
280 Without slit Diamond Case of 25 Each for $335.22

19-304-793

 
foamtec
HT4536D81-1
360 Without slit Diamond Case of 25 Each for $569.92

19-304-794

 
foamtec
HT4536D82-1
360 Without slit Diamond Case of 25 Each for $435.81

19-304-795

 
foamtec
HT4536D83-1
360 Without slit Diamond Case of 25 Each for $335.22
Description & Specifications

Specifications

For Use With (Application) Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear

Ideal for wafer processing tools such as LAM 9600 and 2300 Etch chambers, Hitachi Etch chambers, TEL Etch Chambers, Varian Ion Implant Process Areas, Novellus Speed, AMAT TxZ, WxZ, DxZ, SinGEN, PolyGEN, Endura and Producer CVD, PVD tools and Roth and Rau SiNX CVD tools.

  • Wide grit selection allows for quick removal of process-induced residue from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear
  • Fiber-free construction reduces particle levels in cleaned tools
  • Unique bonding technology minimizes the release of abrasive particles leading to cleaner PM procedures
  • Enables the elimination of H2O2 from PMs, which greatly reduces recovery times