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Foamtec UltraSOLV™ ScrubPADS™ DFS Item

Vacuum Chamber Cleaning ScrubPADS for light to heavy duty PM procedures

$81.73 - $907.38

Specifications

For Use With (Application) Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear
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Products 4
Catalog Number Mfr. No. Grit Includes Material Length (Metric) Price Quantity  
Catalog Number Mfr. No. Grit Includes Material Length (Metric) Price Quantity  
19-041-777 DFS Item
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Foamtec
HT4513PD10
1350 Without slit Diamond 10.16 cm
Pack of 10 Each for $907.38
Case of 10 Pack for $7,777.70
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19-042-110 DFS Item
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Foamtec
HT452210
220 Without slit Silicone Carbide 10.16 cm
Pack of 10 Each for $125.57
Case of 50 Pack for $5,382.00
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19-120-2183 DFS Item
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Foamtec
HT4528D101
280 Without slit Diamond 10.16 cm
Each for $81.73
Case of 100 Each for $6,811.00
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19-304-798 DFS Item
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Foamtec
HT4580D831
800 Without slit Diamond 5.72 cm
Case of 25 Each for $595.51
Only null left
 
Description

Description

Ideal for wafer processing tools such as LAM 9600 and 2300 Etch chambers, Hitachi Etch chambers, TEL Etch Chambers, Varian Ion Implant Process Areas, Novellus Speed, AMAT TxZ, WxZ, DxZ, SinGEN, PolyGEN, Endura and Producer CVD, PVD tools and Roth and Rau SiNX CVD tools.

  • Wide grit selection allows for quick removal of process-induced residue from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear
  • Fiber-free construction reduces particle levels in cleaned tools
  • Unique bonding technology minimizes the release of abrasive particles leading to cleaner PM procedures
  • Enables the elimination of H2O2 from PMs, which greatly reduces recovery times

Specifications

Specifications

Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear
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