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Foamtec UltraSOLV™ ScrubPADS™

Catalog No. 19041777
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Grit:
1350
220
280
800
Includes:
Without slit
Material:
Diamond
Silicone Carbide
Dimensions (L x W):
1.5 x 2.5 in.
3 x 4 in.
4 product options available for selection
Product selection table with 4 available options. Use arrow keys to navigate and Enter or Space to select.
Catalog No. Grit Includes Material Dimensions (L x W)
19041777 1350 Without slit Diamond 3 x 4 in.
19042110 220 Without slit Silicone Carbide 3 x 4 in.
191202183 280 Without slit Diamond 3 x 4 in.
19304798 800 Without slit Diamond 1.5 x 2.5 in.
Use arrow keys to navigate between rows. Press Enter or Space to select a product option. 4 options available.
4 options
Catalog No. 19041777 Supplier Foamtec Supplier No. HT4513PD10
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Description

Vacuum Chamber Cleaning ScrubPADS for light to heavy duty PM procedures

Ideal for wafer processing tools such as LAM 9600 and 2300 Etch chambers, Hitachi Etch chambers, TEL Etch Chambers, Varian Ion Implant Process Areas, Novellus Speed, AMAT TxZ, WxZ, DxZ, SinGEN, PolyGEN, Endura and Producer CVD, PVD tools and Roth and Rau SiNX CVD tools.

  • Wide grit selection allows for quick removal of process-induced residue from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear
  • Fiber-free construction reduces particle levels in cleaned tools
  • Unique bonding technology minimizes the release of abrasive particles leading to cleaner PM procedures
  • Enables the elimination of H2O2 from PMs, which greatly reduces recovery times

Specifications

Dimensions (L x W) 3 x 4 in.
For Use With (Application) Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear
Grit 1350
Includes Without slit
Length (Metric) 10.16 cm
Material Diamond