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Sputtering Targets

Sputtering targets are specialized materials employed for thin-film deposition in various industries, including electronics, energy, and textiles. These targets can be composed of different elemental or alloy compositions, such as pure metals or ceramics, and are bombarded by ions, causing atoms or molecules to be ejected from their surface. These particles then deposit on a substrate to create a thin, uniform film. Different types of sputtering targets exist, including planar or rotary targets and a range of materials, such as gold, silver, titanium, and tungsten. Their selection depends on different factors like the application requirements, material properties, and compatibility with the sputtering system.
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1 – 15 of 55 results
1

Zinc sputtering target, 76.2mm (3.0in) dia x 3.18mm (0.125in) thick, 99.99% (metals basis)

CAS: 7440-66-6 Molecular Formula: Zn Molecular Weight (g/mol): 65.38 MDL Number: MFCD00011291 InChI Key: HCHKCACWOHOZIP-UHFFFAOYSA-N Synonym: dust,cinc,powder,merrillite,rheinzink,jasad,blue powder,granular,zinc, elemental,emanay dust PubChem CID: 23994 ChEBI: CHEBI:30185 IUPAC Name: zinc SMILES: [Zn]

PubChem CID 23994
CAS 7440-66-6
Molecular Weight (g/mol) 65.38
ChEBI CHEBI:30185
MDL Number MFCD00011291
SMILES [Zn]
Synonym dust,cinc,powder,merrillite,rheinzink,jasad,blue powder,granular,zinc, elemental,emanay dust
IUPAC Name zinc
InChI Key HCHKCACWOHOZIP-UHFFFAOYSA-N
Molecular Formula Zn
2

Cobalt sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.95% (metals basis)

CAS: 7440-48-4 Molecular Formula: Co Molecular Weight (g/mol): 58.93 MDL Number: MFCD00010935 InChI Key: GUTLYIVDDKVIGB-UHFFFAOYSA-N Synonym: kobalt,cobalto,moncation,co1+,cobaltum,powder,cobalt, ion co1+,hydrido,atom,hydride PubChem CID: 104730 ChEBI: CHEBI:27638 IUPAC Name: cobalt SMILES: [Co]

PubChem CID 104730
CAS 7440-48-4
Molecular Weight (g/mol) 58.93
ChEBI CHEBI:27638
MDL Number MFCD00010935
SMILES [Co]
Synonym kobalt,cobalto,moncation,co1+,cobaltum,powder,cobalt, ion co1+,hydrido,atom,hydride
IUPAC Name cobalt
InChI Key GUTLYIVDDKVIGB-UHFFFAOYSA-N
Molecular Formula Co
3

Magnesium sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.95% (metals basis), Thermo Scientific Chemicals

CAS: 7439-95-4 Molecular Formula: Mg Molecular Weight (g/mol): 24.30 MDL Number: MFCD00085308 InChI Key: JLVVSXFLKOJNIY-UHFFFAOYSA-N Synonym: magnesio,sheet,powdered,magnesio italian,turnings,rieke's active,ribbon,unii-i38zp9992a,hsdb 654,nitrate, acs PubChem CID: 5462224 ChEBI: CHEBI:25107 IUPAC Name: magnesium SMILES: [Mg]

PubChem CID 5462224
CAS 7439-95-4
Molecular Weight (g/mol) 24.30
ChEBI CHEBI:25107
MDL Number MFCD00085308
SMILES [Mg]
Synonym magnesio,sheet,powdered,magnesio italian,turnings,rieke's active,ribbon,unii-i38zp9992a,hsdb 654,nitrate, acs
IUPAC Name magnesium
InChI Key JLVVSXFLKOJNIY-UHFFFAOYSA-N
Molecular Formula Mg
4

Molybdenum sputtering target, 76.2mm (3.0in) dia x 3.18mm (0.125in) thick, 99.95% (metals basis)

CAS: 7439-98-7 Molecular Formula: Mo Molecular Weight (g/mol): 95.95 MDL Number: MFCD00003465 InChI Key: ZOKXTWBITQBERF-UHFFFAOYSA-N Synonym: molybdenum, elemental,6+ ion,mchvl,vi ion,molybdenum, metallic,metco 63,atom,molybdenum, ion 6+,tsm1,amperit 106.2 PubChem CID: 23932 ChEBI: CHEBI:28685 IUPAC Name: molybdenum SMILES: [Mo]

PubChem CID 23932
CAS 7439-98-7
Molecular Weight (g/mol) 95.95
ChEBI CHEBI:28685
MDL Number MFCD00003465
SMILES [Mo]
Synonym molybdenum, elemental,6+ ion,mchvl,vi ion,molybdenum, metallic,metco 63,atom,molybdenum, ion 6+,tsm1,amperit 106.2
IUPAC Name molybdenum
InChI Key ZOKXTWBITQBERF-UHFFFAOYSA-N
Molecular Formula Mo
5

Tungsten sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.95% (metals basis)

CAS: 7440-33-7 Molecular Formula: W Molecular Weight (g/mol): 183.84 MDL Number: MFCD00011461 InChI Key: WFKWXMTUELFFGS-UHFFFAOYSA-N Synonym: wolfram,ion,va,tungsten, elemental,wolframium,unii-v9306cxo6g,4+ ion,tungsten, soluble compounds,tungsten, insoluble compounds,powder PubChem CID: 23964 ChEBI: CHEBI:27998 IUPAC Name: tungsten SMILES: [W]

PubChem CID 23964
CAS 7440-33-7
Molecular Weight (g/mol) 183.84
ChEBI CHEBI:27998
MDL Number MFCD00011461
SMILES [W]
Synonym wolfram,ion,va,tungsten, elemental,wolframium,unii-v9306cxo6g,4+ ion,tungsten, soluble compounds,tungsten, insoluble compounds,powder
IUPAC Name tungsten
InChI Key WFKWXMTUELFFGS-UHFFFAOYSA-N
Molecular Formula W
6

Tungsten sputtering target, 76.2mm (3.0in) dia x 6.35mm (0.250in) thick, 99.95% (metals basis)

CAS: 7440-33-7 Molecular Formula: W Molecular Weight (g/mol): 183.84 MDL Number: MFCD00011461 InChI Key: WFKWXMTUELFFGS-UHFFFAOYSA-N Synonym: wolfram,ion,va,tungsten, elemental,wolframium,unii-v9306cxo6g,4+ ion,tungsten, soluble compounds,tungsten, insoluble compounds,powder PubChem CID: 23964 ChEBI: CHEBI:27998 IUPAC Name: tungsten SMILES: [W]

PubChem CID 23964
CAS 7440-33-7
Molecular Weight (g/mol) 183.84
ChEBI CHEBI:27998
MDL Number MFCD00011461
SMILES [W]
Synonym wolfram,ion,va,tungsten, elemental,wolframium,unii-v9306cxo6g,4+ ion,tungsten, soluble compounds,tungsten, insoluble compounds,powder
IUPAC Name tungsten
InChI Key WFKWXMTUELFFGS-UHFFFAOYSA-N
Molecular Formula W
7

Copper sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.995% (metals basis)

CAS: 7440-50-8 Molecular Formula: Cu Molecular Weight (g/mol): 63.55 MDL Number: MFCD00010965 InChI Key: RYGMFSIKBFXOCR-UHFFFAOYSA-N Synonym: cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer PubChem CID: 23978 ChEBI: CHEBI:30052 IUPAC Name: copper SMILES: [Cu]

PubChem CID 23978
CAS 7440-50-8
Molecular Weight (g/mol) 63.55
ChEBI CHEBI:30052
MDL Number MFCD00010965
SMILES [Cu]
Synonym cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer
IUPAC Name copper
InChI Key RYGMFSIKBFXOCR-UHFFFAOYSA-N
Molecular Formula Cu
8

Titanium sputtering target, 76.2mm (3.0in) dia x 6.35mm (0.250in) thick, 99.995% (metals basis)

CAS: 7440-32-6 Molecular Formula: Ti Molecular Weight (g/mol): 47.87 MDL Number: MFCD00011264,MFCD00151301 InChI Key: RTAQQCXQSZGOHL-UHFFFAOYSA-N Synonym: oremet,alloy,cp,vt1,c.p.,contimet 30,jistp28,titanium-125,ii hydride,titan vt 1-1 PubChem CID: 23963 ChEBI: CHEBI:33341 IUPAC Name: titanium SMILES: [Ti]

PubChem CID 23963
CAS 7440-32-6
Molecular Weight (g/mol) 47.87
ChEBI CHEBI:33341
MDL Number MFCD00011264,MFCD00151301
SMILES [Ti]
Synonym oremet,alloy,cp,vt1,c.p.,contimet 30,jistp28,titanium-125,ii hydride,titan vt 1-1
IUPAC Name titanium
InChI Key RTAQQCXQSZGOHL-UHFFFAOYSA-N
Molecular Formula Ti
9

Ytterbium sputtering target, 50.8mm dia x 1.59mm thick

CAS: 7440-64-4 Molecular Formula: Yb Molecular Weight (g/mol): 173.05 MDL Number: MFCD00011286 InChI Key: NAWDYIZEMPQZHO-UHFFFAOYSA-N Synonym: unii-mnq4o4wsi1,hydride,mnq4o4wsi1,foil, 3n,yterbio,ingot,powder,ii ion,chips, 3n,ingot, 3n PubChem CID: 23992 ChEBI: CHEBI:33381 IUPAC Name: ytterbium SMILES: [Yb]

PubChem CID 23992
CAS 7440-64-4
Molecular Weight (g/mol) 173.05
ChEBI CHEBI:33381
MDL Number MFCD00011286
SMILES [Yb]
Synonym unii-mnq4o4wsi1,hydride,mnq4o4wsi1,foil, 3n,yterbio,ingot,powder,ii ion,chips, 3n,ingot, 3n
IUPAC Name ytterbium
InChI Key NAWDYIZEMPQZHO-UHFFFAOYSA-N
Molecular Formula Yb
10

Gadolinium sputtering target, 50.8mm dia x 3.18mm thick

CAS: 7440-54-2 Molecular Formula: Gd Molecular Weight (g/mol): 157.25 MDL Number: MFCD00011022 InChI Key: UIWYJDYFSGRHKR-UHFFFAOYSA-N Synonym: atom,gadolinio,unii-au0v1lm3jt,trihydride,au0v1lm3jt,foil, 3n,gadolinium, elemental,ingot,gadolinium, chips,compounds PubChem CID: 23982 ChEBI: CHEBI:33375 IUPAC Name: gadolinium SMILES: [Gd]

PubChem CID 23982
CAS 7440-54-2
Molecular Weight (g/mol) 157.25
ChEBI CHEBI:33375
MDL Number MFCD00011022
SMILES [Gd]
Synonym atom,gadolinio,unii-au0v1lm3jt,trihydride,au0v1lm3jt,foil, 3n,gadolinium, elemental,ingot,gadolinium, chips,compounds
IUPAC Name gadolinium
InChI Key UIWYJDYFSGRHKR-UHFFFAOYSA-N
Molecular Formula Gd
11

Cerium sputtering target, 76.2mm dia x 3.18mm thick

CAS: 7440-45-1 Molecular Formula: Ce Molecular Weight (g/mol): 140.12 MDL Number: MFCD00010924 InChI Key: GWXLDORMOJMVQZ-UHFFFAOYSA-N Synonym: cerio,ingot,cerium, chips,foil, 3n,zer,ceramics-aeium,acmc-1bl5r,chips, 3n reo,powder,-200 mesh,cerium PubChem CID: 23974 ChEBI: CHEBI:33369 IUPAC Name: cerium SMILES: [Ce]

PubChem CID 23974
CAS 7440-45-1
Molecular Weight (g/mol) 140.12
ChEBI CHEBI:33369
MDL Number MFCD00010924
SMILES [Ce]
Synonym cerio,ingot,cerium, chips,foil, 3n,zer,ceramics-aeium,acmc-1bl5r,chips, 3n reo,powder,-200 mesh,cerium
IUPAC Name cerium
InChI Key GWXLDORMOJMVQZ-UHFFFAOYSA-N
Molecular Formula Ce
12

Silver sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.99% (metals basis)

CAS: 7440-22-4 Molecular Formula: Ag Molecular Weight (g/mol): 107.87 MDL Number: MFCD00003397 InChI Key: BQCADISMDOOEFD-UHFFFAOYSA-N Synonym: argentum,metal,atom,colloidal,silver, colloidal,silver, elemental,algaedyn,amalgum,epinall,silber PubChem CID: 23954 ChEBI: CHEBI:9141 IUPAC Name: silver SMILES: [Ag]

PubChem CID 23954
CAS 7440-22-4
Molecular Weight (g/mol) 107.87
ChEBI CHEBI:9141
MDL Number MFCD00003397
SMILES [Ag]
Synonym argentum,metal,atom,colloidal,silver, colloidal,silver, elemental,algaedyn,amalgum,epinall,silber
IUPAC Name silver
InChI Key BQCADISMDOOEFD-UHFFFAOYSA-N
Molecular Formula Ag
13

Silver sputtering target, 76.2mm (3.0in) dia x 3.18mm (0.125in) thick, 99.99% (metals basis)

CAS: 7440-22-4 Molecular Formula: Ag Molecular Weight (g/mol): 107.87 MDL Number: MFCD00003397 InChI Key: BQCADISMDOOEFD-UHFFFAOYSA-N Synonym: argentum,metal,atom,colloidal,silver, colloidal,silver, elemental,algaedyn,amalgum,epinall,silber PubChem CID: 23954 ChEBI: CHEBI:9141 IUPAC Name: silver SMILES: [Ag]

PubChem CID 23954
CAS 7440-22-4
Molecular Weight (g/mol) 107.87
ChEBI CHEBI:9141
MDL Number MFCD00003397
SMILES [Ag]
Synonym argentum,metal,atom,colloidal,silver, colloidal,silver, elemental,algaedyn,amalgum,epinall,silber
IUPAC Name silver
InChI Key BQCADISMDOOEFD-UHFFFAOYSA-N
Molecular Formula Ag
14

Silicon sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.999% (metals basis)

CAS: 7440-21-3 Molecular Formula: Si Molecular Weight (g/mol): 28.09 MDL Number: MFCD00085311 InChI Key: XUIMIQQOPSSXEZ-UHFFFAOYSA-N Synonym: metal,silicone,defoamer s-10,flots 100sco,powder,dust,unii-z4152n8iui,polyeristalline powder,ccris 6599,ccris 6831 PubChem CID: 5461123 ChEBI: CHEBI:27573 IUPAC Name: silicon SMILES: [Si]

PubChem CID 5461123
CAS 7440-21-3
Molecular Weight (g/mol) 28.09
ChEBI CHEBI:27573
MDL Number MFCD00085311
SMILES [Si]
Synonym metal,silicone,defoamer s-10,flots 100sco,powder,dust,unii-z4152n8iui,polyeristalline powder,ccris 6599,ccris 6831
IUPAC Name silicon
InChI Key XUIMIQQOPSSXEZ-UHFFFAOYSA-N
Molecular Formula Si
15

Niobium sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.95% (metals basis excluding Ta)

CAS: 3-1-7440 Molecular Formula: Nb Molecular Weight (g/mol): 92.91 MDL Number: MFCD00011126 InChI Key: GUCVJGMIXFAOAE-UHFFFAOYSA-N Synonym: columbium,element,niobium-93,powder,foil,rod,vn 1,foil, 0.25mm 0.01in thick,columbio,niobio PubChem CID: 23936 ChEBI: CHEBI:33344 IUPAC Name: niobium SMILES: [Nb]

PubChem CID 23936
CAS 3-1-7440
Molecular Weight (g/mol) 92.91
ChEBI CHEBI:33344
MDL Number MFCD00011126
SMILES [Nb]
Synonym columbium,element,niobium-93,powder,foil,rod,vn 1,foil, 0.25mm 0.01in thick,columbio,niobio
IUPAC Name niobium
InChI Key GUCVJGMIXFAOAE-UHFFFAOYSA-N
Molecular Formula Nb