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Sputtering Targets

Sputtering targets are specialized materials employed for thin-film deposition in various industries, including electronics, energy, and textiles. These targets can be composed of different elemental or alloy compositions, such as pure metals or ceramics, and are bombarded by ions, causing atoms or molecules to be ejected from their surface. These particles then deposit on a substrate to create a thin, uniform film. Different types of sputtering targets exist, including planar or rotary targets and a range of materials, such as gold, silver, titanium, and tungsten. Their selection depends on different factors like the application requirements, material properties, and compatibility with the sputtering system.
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Keyword Search:
1 – 15 of 55 results
1

Magnesium sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.95% (metals basis), Thermo Scientific Chemicals

CAS: 7439-95-4 Molecular Formula: Mg Molecular Weight (g/mol): 24.30 MDL Number: MFCD00085308 InChI Key: JLVVSXFLKOJNIY-UHFFFAOYSA-N Synonym: magnesio,sheet,powdered,magnesio italian,turnings,rieke's active,ribbon,unii-i38zp9992a,hsdb 654,nitrate, acs PubChem CID: 5462224 ChEBI: CHEBI:25107 IUPAC Name: magnesium SMILES: [Mg]

PubChem CID 5462224
CAS 7439-95-4
Molecular Weight (g/mol) 24.30
ChEBI CHEBI:25107
MDL Number MFCD00085308
SMILES [Mg]
Synonym magnesio,sheet,powdered,magnesio italian,turnings,rieke's active,ribbon,unii-i38zp9992a,hsdb 654,nitrate, acs
IUPAC Name magnesium
InChI Key JLVVSXFLKOJNIY-UHFFFAOYSA-N
Molecular Formula Mg
2

Tin sputtering target, 76.2mm (3.0in) dia x 3.18mm (0.125in) thick, 99.995% (metals basis)

CAS: 7440-31-5 Molecular Formula: Sn Molecular Weight (g/mol): 118.71 MDL Number: MFCD00133862 InChI Key: ATJFFYVFTNAWJD-UHFFFAOYSA-N Synonym: powder,stannum,metallic,tin, elemental,wang,zinn,flake,tin, metal,silver matt powder,zinn german PubChem CID: 5352426 ChEBI: CHEBI:32990 IUPAC Name: tin SMILES: [Sn]

PubChem CID 5352426
CAS 7440-31-5
Molecular Weight (g/mol) 118.71
ChEBI CHEBI:32990
MDL Number MFCD00133862
SMILES [Sn]
Synonym powder,stannum,metallic,tin, elemental,wang,zinn,flake,tin, metal,silver matt powder,zinn german
IUPAC Name tin
InChI Key ATJFFYVFTNAWJD-UHFFFAOYSA-N
Molecular Formula Sn
3

Nickel sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.99% (metals basis)

CAS: 7440-02-0 Molecular Formula: Ni Molecular Weight (g/mol): 58.69 MDL Number: MFCD00011137 MFCD06798735 InChI Key: PXHVJJICTQNCMI-UHFFFAOYSA-N Synonym: raney alloy,fibrex,catalyst,particles,fibrex p,nickel, elemental,nichel italian,nickel, soluble salts,carbonyl powder,niccolum PubChem CID: 935 ChEBI: CHEBI:28112 IUPAC Name: nickel SMILES: [Ni]

PubChem CID 935
CAS 7440-02-0
Molecular Weight (g/mol) 58.69
ChEBI CHEBI:28112
MDL Number MFCD00011137 MFCD06798735
SMILES [Ni]
Synonym raney alloy,fibrex,catalyst,particles,fibrex p,nickel, elemental,nichel italian,nickel, soluble salts,carbonyl powder,niccolum
IUPAC Name nickel
InChI Key PXHVJJICTQNCMI-UHFFFAOYSA-N
Molecular Formula Ni
4

Zinc oxide sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.9% (metals basis)

CAS: 1314-13-2 Molecular Formula: OZn Molecular Weight (g/mol): 81.38 MDL Number: MFCD00011300 InChI Key: XLOMVQKBTHCTTD-UHFFFAOYSA-N Synonym: zinc oxide,zinc white,amalox,permanent white,Chinese white,snow white,emanay zinc oxide,felling zinc oxide,zinc oxide zno,akro-zinc bar 85 PubChem CID: 14806 ChEBI: CHEBI:36560 IUPAC Name: oxozinc SMILES: O=[Zn]

PubChem CID 14806
CAS 1314-13-2
Molecular Weight (g/mol) 81.38
ChEBI CHEBI:36560
MDL Number MFCD00011300
SMILES O=[Zn]
Synonym zinc oxide,zinc white,amalox,permanent white,Chinese white,snow white,emanay zinc oxide,felling zinc oxide,zinc oxide zno,akro-zinc bar 85
IUPAC Name oxozinc
InChI Key XLOMVQKBTHCTTD-UHFFFAOYSA-N
Molecular Formula OZn
5

Titanium nitride sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.5% (metals basis)

CAS: 25583-20-4 Molecular Formula: NTi Molecular Weight (g/mol): 61.87 MDL Number: MFCD00049596 InChI Key: NRTOMJZYCJJWKI-UHFFFAOYSA-N Synonym: titanium nitride,titanium nitride tin,nitridotitanium,unii-6rw464feff,titannitrid,titaniumylidyneamine,titanium mononitride,titanium nitride, <3 mum,6rw464feff,titanium nitride tin grade a PubChem CID: 93091 IUPAC Name: azanylidynetitanium SMILES: N#[Ti]

PubChem CID 93091
CAS 25583-20-4
Molecular Weight (g/mol) 61.87
MDL Number MFCD00049596
SMILES N#[Ti]
Synonym titanium nitride,titanium nitride tin,nitridotitanium,unii-6rw464feff,titannitrid,titaniumylidyneamine,titanium mononitride,titanium nitride, <3 mum,6rw464feff,titanium nitride tin grade a
IUPAC Name azanylidynetitanium
InChI Key NRTOMJZYCJJWKI-UHFFFAOYSA-N
Molecular Formula NTi
6

Tungsten sputtering target, 76.2mm (3.0in) dia x 3.18mm (0.125in) thick, 99.95% (metals basis)

CAS: 7440-33-7 Molecular Formula: W Molecular Weight (g/mol): 183.84 MDL Number: MFCD00011461 InChI Key: WFKWXMTUELFFGS-UHFFFAOYSA-N Synonym: wolfram,ion,va,tungsten, elemental,wolframium,unii-v9306cxo6g,4+ ion,tungsten, soluble compounds,tungsten, insoluble compounds,powder PubChem CID: 23964 ChEBI: CHEBI:27998 IUPAC Name: tungsten SMILES: [W]

PubChem CID 23964
CAS 7440-33-7
Molecular Weight (g/mol) 183.84
ChEBI CHEBI:27998
MDL Number MFCD00011461
SMILES [W]
Synonym wolfram,ion,va,tungsten, elemental,wolframium,unii-v9306cxo6g,4+ ion,tungsten, soluble compounds,tungsten, insoluble compounds,powder
IUPAC Name tungsten
InChI Key WFKWXMTUELFFGS-UHFFFAOYSA-N
Molecular Formula W
7

Cobalt sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.95% (metals basis)

CAS: 7440-48-4 Molecular Formula: Co Molecular Weight (g/mol): 58.93 MDL Number: MFCD00010935 InChI Key: GUTLYIVDDKVIGB-UHFFFAOYSA-N Synonym: kobalt,cobalto,moncation,co1+,cobaltum,powder,cobalt, ion co1+,hydrido,atom,hydride PubChem CID: 104730 ChEBI: CHEBI:27638 IUPAC Name: cobalt SMILES: [Co]

PubChem CID 104730
CAS 7440-48-4
Molecular Weight (g/mol) 58.93
ChEBI CHEBI:27638
MDL Number MFCD00010935
SMILES [Co]
Synonym kobalt,cobalto,moncation,co1+,cobaltum,powder,cobalt, ion co1+,hydrido,atom,hydride
IUPAC Name cobalt
InChI Key GUTLYIVDDKVIGB-UHFFFAOYSA-N
Molecular Formula Co
8

Copper sputtering target, 76.2mm (3.0in) dia x 6.35mm (0.250in) thick, 99.999% (metals basis)

CAS: 7440-50-8 Molecular Formula: Cu Molecular Weight (g/mol): 63.55 MDL Number: MFCD00010965 InChI Key: RYGMFSIKBFXOCR-UHFFFAOYSA-N Synonym: cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer PubChem CID: 23978 ChEBI: CHEBI:30052 IUPAC Name: copper SMILES: [Cu]

PubChem CID 23978
CAS 7440-50-8
Molecular Weight (g/mol) 63.55
ChEBI CHEBI:30052
MDL Number MFCD00010965
SMILES [Cu]
Synonym cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer
IUPAC Name copper
InChI Key RYGMFSIKBFXOCR-UHFFFAOYSA-N
Molecular Formula Cu
9

Copper sputtering target, 76.2mm (3.0in) dia x 3.18mm (0.125in) thick, 99.999% (metals basis)

CAS: 7440-50-8 Molecular Formula: Cu Molecular Weight (g/mol): 63.55 MDL Number: MFCD00010965 InChI Key: RYGMFSIKBFXOCR-UHFFFAOYSA-N Synonym: cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer PubChem CID: 23978 ChEBI: CHEBI:30052 IUPAC Name: copper SMILES: [Cu]

PubChem CID 23978
CAS 7440-50-8
Molecular Weight (g/mol) 63.55
ChEBI CHEBI:30052
MDL Number MFCD00010965
SMILES [Cu]
Synonym cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer
IUPAC Name copper
InChI Key RYGMFSIKBFXOCR-UHFFFAOYSA-N
Molecular Formula Cu
10

Copper sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.999% (metals basis)

CAS: 7440-50-8 Molecular Formula: Cu Molecular Weight (g/mol): 63.55 MDL Number: MFCD00010965 InChI Key: RYGMFSIKBFXOCR-UHFFFAOYSA-N Synonym: cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer PubChem CID: 23978 ChEBI: CHEBI:30052 IUPAC Name: copper SMILES: [Cu]

PubChem CID 23978
CAS 7440-50-8
Molecular Weight (g/mol) 63.55
ChEBI CHEBI:30052
MDL Number MFCD00010965
SMILES [Cu]
Synonym cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer
IUPAC Name copper
InChI Key RYGMFSIKBFXOCR-UHFFFAOYSA-N
Molecular Formula Cu
11

Tungsten sputtering target, 76.2mm (3.0in) dia x 6.35mm (0.250in) thick, 99.95% (metals basis)

CAS: 7440-33-7 Molecular Formula: W Molecular Weight (g/mol): 183.84 MDL Number: MFCD00011461 InChI Key: WFKWXMTUELFFGS-UHFFFAOYSA-N Synonym: wolfram,ion,va,tungsten, elemental,wolframium,unii-v9306cxo6g,4+ ion,tungsten, soluble compounds,tungsten, insoluble compounds,powder PubChem CID: 23964 ChEBI: CHEBI:27998 IUPAC Name: tungsten SMILES: [W]

PubChem CID 23964
CAS 7440-33-7
Molecular Weight (g/mol) 183.84
ChEBI CHEBI:27998
MDL Number MFCD00011461
SMILES [W]
Synonym wolfram,ion,va,tungsten, elemental,wolframium,unii-v9306cxo6g,4+ ion,tungsten, soluble compounds,tungsten, insoluble compounds,powder
IUPAC Name tungsten
InChI Key WFKWXMTUELFFGS-UHFFFAOYSA-N
Molecular Formula W
12

Tungsten sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.95% (metals basis)

CAS: 7440-33-7 Molecular Formula: W Molecular Weight (g/mol): 183.84 MDL Number: MFCD00011461 InChI Key: WFKWXMTUELFFGS-UHFFFAOYSA-N Synonym: wolfram,ion,va,tungsten, elemental,wolframium,unii-v9306cxo6g,4+ ion,tungsten, soluble compounds,tungsten, insoluble compounds,powder PubChem CID: 23964 ChEBI: CHEBI:27998 IUPAC Name: tungsten SMILES: [W]

PubChem CID 23964
CAS 7440-33-7
Molecular Weight (g/mol) 183.84
ChEBI CHEBI:27998
MDL Number MFCD00011461
SMILES [W]
Synonym wolfram,ion,va,tungsten, elemental,wolframium,unii-v9306cxo6g,4+ ion,tungsten, soluble compounds,tungsten, insoluble compounds,powder
IUPAC Name tungsten
InChI Key WFKWXMTUELFFGS-UHFFFAOYSA-N
Molecular Formula W
13

Cerium sputtering target, 76.2mm dia x 3.18mm thick

CAS: 7440-45-1 Molecular Formula: Ce Molecular Weight (g/mol): 140.12 MDL Number: MFCD00010924 InChI Key: GWXLDORMOJMVQZ-UHFFFAOYSA-N Synonym: cerio,ingot,cerium, chips,foil, 3n,zer,ceramics-aeium,acmc-1bl5r,chips, 3n reo,powder,-200 mesh,cerium PubChem CID: 23974 ChEBI: CHEBI:33369 IUPAC Name: cerium SMILES: [Ce]

PubChem CID 23974
CAS 7440-45-1
Molecular Weight (g/mol) 140.12
ChEBI CHEBI:33369
MDL Number MFCD00010924
SMILES [Ce]
Synonym cerio,ingot,cerium, chips,foil, 3n,zer,ceramics-aeium,acmc-1bl5r,chips, 3n reo,powder,-200 mesh,cerium
IUPAC Name cerium
InChI Key GWXLDORMOJMVQZ-UHFFFAOYSA-N
Molecular Formula Ce
14

Silicon sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.999% (metals basis)

CAS: 7440-21-3 Molecular Formula: Si Molecular Weight (g/mol): 28.09 MDL Number: MFCD00085311 InChI Key: XUIMIQQOPSSXEZ-UHFFFAOYSA-N Synonym: metal,silicone,defoamer s-10,flots 100sco,powder,dust,unii-z4152n8iui,polyeristalline powder,ccris 6599,ccris 6831 PubChem CID: 5461123 ChEBI: CHEBI:27573 IUPAC Name: silicon SMILES: [Si]

PubChem CID 5461123
CAS 7440-21-3
Molecular Weight (g/mol) 28.09
ChEBI CHEBI:27573
MDL Number MFCD00085311
SMILES [Si]
Synonym metal,silicone,defoamer s-10,flots 100sco,powder,dust,unii-z4152n8iui,polyeristalline powder,ccris 6599,ccris 6831
IUPAC Name silicon
InChI Key XUIMIQQOPSSXEZ-UHFFFAOYSA-N
Molecular Formula Si
15

Titanium sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.7% (metals basis)

CAS: 7440-32-6 Molecular Formula: Ti Molecular Weight (g/mol): 47.87 MDL Number: MFCD00011264,MFCD00151301 InChI Key: RTAQQCXQSZGOHL-UHFFFAOYSA-N Synonym: oremet,alloy,cp,vt1,c.p.,contimet 30,jistp28,titanium-125,ii hydride,titan vt 1-1 PubChem CID: 23963 ChEBI: CHEBI:33341 IUPAC Name: titanium SMILES: [Ti]

PubChem CID 23963
CAS 7440-32-6
Molecular Weight (g/mol) 47.87
ChEBI CHEBI:33341
MDL Number MFCD00011264,MFCD00151301
SMILES [Ti]
Synonym oremet,alloy,cp,vt1,c.p.,contimet 30,jistp28,titanium-125,ii hydride,titan vt 1-1
IUPAC Name titanium
InChI Key RTAQQCXQSZGOHL-UHFFFAOYSA-N
Molecular Formula Ti