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Titanium silicide, 99.5% (metals basis)
CAS: 12067-57-1 | Si3Ti5 | 323.59 g/mol
Supplier: Thermo Scientific Chemicals 01308718
Description
It is used as source, gate and drain contacts and local interconnections in CMOS integrated circuits. it is used in the C54 phase.
This Thermo Scientific Chemicals brand product was originally part of the Alfa Aesar product portfolio. Some documentation and label information may refer to the legacy brand. The original Alfa Aesar product / item code or SKU reference has not changed as a part of the brand transition to Thermo Scientific Chemicals.
Specifications
| Titanium Silicide | |
| 12067-57-1 | |
| 50 g | |
| Si3Ti5 | |
| silicon; titanium, titanium silicide ti5si3, pentatitanium trisilicide, titanium silicide,-325 mesh | |
| GNKTZDSRQHMHLZ-UHFFFAOYSA-N | |
| silicon;titanium | |
| 6336553 |
| 2130°C | |
| Powder | |
| 99.5%, metal basis | |
| MFCD01310208 | |
| Soluble in hydrofluoric acid. Insoluble in water. | |
| [Si].[Si].[Si].[Ti].[Ti].[Ti].[Ti].[Ti] | |
| 323.59 | |
| 323.76 |
Chemical Identifiers
| 12067-57-1 | |
| 323.59 | |
| GNKTZDSRQHMHLZ-UHFFFAOYSA-N | |
| 6336553 | |
| [Si].[Si].[Si].[Ti].[Ti].[Ti].[Ti].[Ti] |
| Si3Ti5 | |
| MFCD01310208 | |
| silicon; titanium, titanium silicide ti5si3, pentatitanium trisilicide, titanium silicide,-325 mesh | |
| silicon;titanium |
Safety and Handling
In case of contact with eyes, rinse immediately with plenty of water and seek medical advice. Wear suitable gloves. This material and/or its container must be disposed of as hazardous waste.
P210-P240-P241-P261-P264b-P271-P280-P302+P352-P304+P340-P305+P351+P338-P312-P332+P313-P362-P370+P378q-P501c
H228-H315-H319-H335
DOTInformation : DOT Class: 4.1; Packaging Group: III
EINECSNumber : 235-082-9
TSCA : Yes
Recommended Storage : Ambient temperatures
RUO – Research Use Only