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Thermo Scientific™ SURF-CAL™ Particle Size Standards

Simplify the preparation of calibration wafers with these particle size standards.

$588.21 - $3,984.42

Specifications

Additive None
Composition Polystyrene
Contents Polystyrene microspheres in deionized, filtered water
Includes Certificate of Calibration and Traceability to NIST
Material Polystyrene
View More Specs
Products
Catalog Number Mfr. No. Concentration Diameter (Metric) Price Quantity    

09980138

 
thermo scientific™
PD-047
3 x 108 particles/mL 0.047μm Each for $588.21

09980139

 
thermo scientific™
PD-047B
1 x 10¹° particles/mL 0.047μm Each for $3,984.42

09980140

 
thermo scientific™
PD-064
3 x 108 particles/mL 0.064μm Each for $588.21

09980141

 
thermo scientific™
PD-064B
1 x 10¹° particles/mL 0.064μm Each for $3,984.42

09980146

 
thermo scientific™
PD-083
3 x 108 particles/mL 0.083μm Each for $588.21

09980147

 
thermo scientific™
PD-083B
1 x 10¹° particles/mL 0.083μm Each for $3,984.42

09980150

 
thermo scientific™
PD-092
3 x 108 particles/mL 0.092μm Each for $588.21

09980151

 
thermo scientific™
PD-092B
1 x 10¹° particles/mL 0.092μm Each for $3,984.42

09980152

 
thermo scientific™
PD-100
3 x 108 particles/mL 0.100μm Each for $588.21

09980153

 
thermo scientific™
PD-100B
1 x 10¹° particles/mL 0.100μm Each for $3,984.42

09980178

 
thermo scientific™
PD1100
3 x 108 particles/mL 1.112μm Each for $588.21

09980179

 
thermo scientific™
PD1100B
1 x 10¹° particles/mL 1.112μm Each for $3,984.42

09980157

 
thermo scientific™
PD-125B
1 x 10¹° particles/mL 0.126μm Each for $3,984.42

09980158

 
thermo scientific™
PD-155
3 x 108 particles/mL 0.155μm Each for $588.21

09980159

 
thermo scientific™
PD-155B
1 x 10¹° particles/mL 0.155μm Each for $3,984.42

09980180

 
thermo scientific™
PD1600
3 x 108 particles/mL 1.57μm Each for $588.21

09980162

 
thermo scientific™
PD-200
3 x 108 particles/mL 0.202μm Each for $588.21

09980181

 
thermo scientific™
PD2000
3 x 108 particles/mL 2.01μm Each for $588.21

09980163

 
thermo scientific™
PD-200B
1 x 10¹° particles/mL 0.202μm Each for $3,984.42

09980164

 
thermo scientific™
PD-204
3 x 108 particles/mL 0.204μm Each for $588.21

09980165

 
thermo scientific™
PD-204B
1 x 10¹° particles/mL 0.204μm Each for $3,984.42

09980166

 
thermo scientific™
PD-215
3 x 108 particles/mL 0.220μm Each for $588.21

09980167

 
thermo scientific™
PD-215B
1 x 10¹° particles/mL 0.220μm Each for $3,984.42

09-980-183

 
thermo scientific™
PD3000
3 x 108 particles/mL 0.304μm Each for $588.21

09980168

 
thermo scientific™
PD-305
3 x 108 particles/mL 0.304μm Each for $588.21

09980169

 
thermo scientific™
PD-305B
1 x 10¹° particles/mL 0.304μm Each for $3,984.42

09980170

 
thermo scientific™
PD-365
3 x 108 particles/mL 0.360μm Each for $588.21

09980171

 
thermo scientific™
PD-365B
1 x 10¹° particles/mL 0.360μm Each for $3,984.42

09980172

 
thermo scientific™
PD-500
3 x 108 particles/mL 0.498μm Each for $588.21

09980173

 
thermo scientific™
PD-500B
1 x 10¹° particles/mL 0.498μm Each for $3,984.42

09980174

 
thermo scientific™
PD-800
3 x 108 particles/mL 0.809μm Each for $588.21

09980175

 
thermo scientific™
PD-800B
1 x 10¹° particles/mL 0.809μm Each for $3,984.42

09980176

 
thermo scientific™
PD-802
3 x 108 particles/mL 0.802μm Each for $588.21

09980177

 
thermo scientific™
PD-802B
1 x 10¹° particles/mL 0.802μm Each for $3,984.42
Description & Specifications

Specifications

Additive None
Composition Polystyrene
Contents Polystyrene microspheres in deionized, filtered water
Includes Certificate of Calibration and Traceability to NIST
Material Polystyrene
Particle Density 1.05g/cm³
Quantity 50mL
Refractive Index 1.59 at 589nm (25°C)
Stability Product stable for a minimum of 12 months
Storage Requirements Unless otherwise stated, refrigerate (2° to 8°C) product when not in use but do not freeze. Store upright and keep bottle tightly sealed. Mix product with gentle inversion by hand or vortex mixer.

Simplify the preparation of calibration wafers with Thermo Scientific™ SURF-CAL™ Particle Size Standards, for calibration and maintenance of Scanning Surface Inspection Systems (SSIS). Available particle sizes correspond to the calibration point sizes required by instrument manufacturers.

Thermo Fisher Scientific™, along with the Semiconductor Industry and SEMI, have established specific particle sizes to be used when calibrating Scanning Surface Inspection Systems. Working with instrument manufacturers, we created the SURF-CAL™ product line to meet SEMI standard guidelines.

  • Available sizes are considered to be critical sizing nodes as defined by the International Technology Roadmap for Semiconductors (ITRS).
  • By depositing SURF-CAL™ NIST™ traceable polystyrene latex spheres (PSL) on specially selected wafers, you can perform periodic calibration checks and compare your scanner with scanners at other locations.
  • You can also assess the performance of your SSIS at critical stages in the manufacturing process.
  • All products are suspended in deionized, filtered water in 50mL bottles at a concentration of 3 × 108 particles per mL.

Note:

Products PD1100 and smaller are also available at 1010 particles per mL for applications using the aid of a Differential Mobility Analyzer (DMA) or other size exclusionary techniques.