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Thermo Scientific™ SURF-CAL™ Particle Size Standards

Simplify the preparation of calibration wafers with these particle size standards.

$614.76 - $4,159.36

Specifications

Additive None
Composition Polystyrene
Contents Polystyrene microspheres in deionized, filtered water
Includes Certificate of Calibration and Traceability to NIST
Material Polystyrene
View More Specs


Products ${productFamilyLength}
Catalog Number Mfr. No. Concentration Diameter (Metric) Price Quantity  
Catalog Number Mfr. No. Concentration Diameter (Metric) Price Quantity  
09980138 Thermo Scientific™
PD-047
3 x 108 particles/mL 0.047μm Each for $614.76
09980139 Thermo Scientific™
PD-047B
1 x 10¹° particles/mL 0.047μm Each for $4,159.36
09980140 Thermo Scientific™
PD-064
3 x 108 particles/mL 0.064μm Each for $614.76
09980141 Thermo Scientific™
PD-064B
1 x 10¹° particles/mL 0.064μm Each for $4,159.36
09980146 Thermo Scientific™
PD-083
3 x 108 particles/mL 0.083μm Each for $614.76
09980147 Thermo Scientific™
PD-083B
1 x 10¹° particles/mL 0.083μm Each for $4,159.36
09980150 Thermo Scientific™
PD-092
3 x 108 particles/mL 0.092μm Each for $614.76
09980151 Thermo Scientific™
PD-092B
1 x 10¹° particles/mL 0.092μm Each for $4,159.36
09980152 Thermo Scientific™
PD-100
3 x 108 particles/mL 0.100μm Each for $614.76
09980153 Thermo Scientific™
PD-100B
1 x 10¹° particles/mL 0.100μm Each for $4,159.36
09980178 Thermo Scientific™
PD1100
3 x 108 particles/mL 1.112μm Each for $614.76
09980179 Thermo Scientific™
PD1100B
1 x 10¹° particles/mL 1.112μm Each for $4,159.36
09980157 Thermo Scientific™
PD-1253B
1 x 10¹° particles/mL 0.126μm Each for $4,159.36
09980158 Thermo Scientific™
PD-155
3 x 108 particles/mL 0.155μm Each for $614.76
09980159 Thermo Scientific™
PD-155B
1 x 10¹° particles/mL 0.155μm Each for $4,159.36
09980180 Thermo Scientific™
PD1600
3 x 108 particles/mL 1.57μm Each for $614.76
09980162 Thermo Scientific™
PD-200
3 x 108 particles/mL 0.202μm Each for $614.76
09980181 Thermo Scientific™
PD2000
3 x 108 particles/mL 2.01μm Each for $614.76
09980163 Thermo Scientific™
PD-200B
1 x 10¹° particles/mL 0.202μm Each for $4,159.36
09980164 Thermo Scientific™
PD-204
3 x 108 particles/mL 0.204μm Each for $614.76
09980165 Thermo Scientific™
PD-204B
1 x 10¹° particles/mL 0.204μm Each for $4,159.36
09980166 Thermo Scientific™
PD-215
3 x 108 particles/mL 0.220μm Each for $614.76
09980167 Thermo Scientific™
PD-215B
1 x 10¹° particles/mL 0.220μm Each for $4,159.36
09-980-183 Thermo Scientific™
PD3000
3 x 108 particles/mL 0.304μm Each for $614.76
09980168 Thermo Scientific™
PD-305
3 x 108 particles/mL 0.304μm Each for $614.76
09980169 Thermo Scientific™
PD-305B
1 x 10¹° particles/mL 0.304μm Each for $4,159.36
09980170 Thermo Scientific™
PD-365
3 x 108 particles/mL 0.360μm Each for $614.76
09980171 Thermo Scientific™
PD-365B
1 x 10¹° particles/mL 0.360μm Each for $4,159.36
09980172 Thermo Scientific™
PD-500
3 x 108 particles/mL 0.498μm Each for $614.76
09980173 Thermo Scientific™
PD-500B
1 x 10¹° particles/mL 0.498μm Each for $4,159.36
09980174 Thermo Scientific™
PD-800
3 x 108 particles/mL 0.809μm Each for $614.76
09980175 Thermo Scientific™
PD-800B
1 x 10¹° particles/mL 0.809μm Each for $4,159.36
09980176 Thermo Scientific™
PD-802
3 x 108 particles/mL 0.802μm Each for $614.76
09980177 Thermo Scientific™
PD-802B
1 x 10¹° particles/mL 0.802μm Each for $4,159.36
Specifications

Description

Simplify the preparation of calibration wafers with Thermo Scientific™ SURF-CAL™ Particle Size Standards, for calibration and maintenance of Scanning Surface Inspection Systems (SSIS). Available particle sizes correspond to the calibration point sizes required by instrument manufacturers.

Thermo Fisher Scientific™, along with the Semiconductor Industry and SEMI, have established specific particle sizes to be used when calibrating Scanning Surface Inspection Systems. Working with instrument manufacturers, we created the SURF-CAL™ product line to meet SEMI standard guidelines.
  • Available sizes are considered to be critical sizing nodes as defined by the International Technology Roadmap for Semiconductors (ITRS).
  • By depositing SURF-CAL™ NIST™ traceable polystyrene latex spheres (PSL) on specially selected wafers, you can perform periodic calibration checks and compare your scanner with scanners at other locations.
  • You can also assess the performance of your SSIS at critical stages in the manufacturing process.
  • All products are suspended in deionized, filtered water in 50mL bottles at a concentration of 3 × 108 particles per mL.

Note:

Products PD1100 and smaller are also available at 1010 particles per mL for applications using the aid of a Differential Mobility Analyzer (DMA) or other size exclusionary techniques.

Description & Specifications

Specifications

None
Polystyrene microspheres in deionized, filtered water
Polystyrene
50mL
Product stable for a minimum of 12 months
Polystyrene
Certificate of Calibration and Traceability to NIST
1.05g/cm³
1.59 at 589nm (25°C)
Unless otherwise stated, refrigerate (2° to 8°C) product when not in use but do not freeze. Store upright and keep bottle tightly sealed. Mix product with gentle inversion by hand or vortex mixer.