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Thermo Scientific™ SURF-CAL™ Particle Size Standards
Simplify the preparation of calibration wafers with these particle size standards.
$799.47 - $5712.91
Specifications
| Additive | None |
|---|---|
| Content And Storage | Unless otherwise stated, refrigerate (2° to 8°C) product when not in use but do not freeze. Store upright and keep bottle tightly sealed. Mix product with gentle inversion by hand or vortex mixer. |
| Contents | Polystyrene microspheres in deionized, filtered water |
| For Use With (Application) | SSIS Calibration and Maintenance |
| Material | Polystyrene |
| Catalog Number | Mfr. No. | Diameter (Metric) | Concentration | Price | Quantity | ||||
|---|---|---|---|---|---|---|---|---|---|
| Catalog Number | Mfr. No. | Diameter (Metric) | Concentration | Price | Quantity | ||||
|
09980138
|
Thermo Scientific™
PD047 |
0.047 μm | 3 x 108 particles/mL |
Each for $799.47
|
|
||||
|
09980139
|
Thermo Scientific™
PD047B |
0.047 μm | 1 x 10¹° particles/mL |
Each for $5,379.38
|
|
||||
|
09980140
|
Thermo Scientific™
PD064 |
0.064 μm | 3 x 108 particles/mL |
Each for $799.47
|
|
||||
|
09980141
|
Thermo Scientific™
PD064B |
0.064 μm | 1 x 10¹° particles/mL |
Each for $5,379.38
|
|
||||
|
09980146
|
Thermo Scientific™
PD083 |
0.083 μm | 3 x 108 particles/mL |
Each for $799.47
|
|
||||
|
09980147
|
Thermo Scientific™
PD083B |
0.083 μm | 1 x 10¹° particles/mL |
Each for $5,379.38
|
|
||||
|
09980150
|
Thermo Scientific™
PD092 |
0.092 μm | 3 x 108 particles/mL |
Each for $799.47
|
|
||||
|
09980151
|
Thermo Scientific™
PD092B |
0.092 μm | 1 x 10¹° particles/mL |
Each for $5,379.38
|
|
||||
|
09980152
|
Thermo Scientific™
PD100 |
0.100 μm | 3 x 108 particles/mL |
Each for $799.47
|
|
||||
|
09980153
|
Thermo Scientific™
PD100B |
0.100 μm | 1 x 10¹° particles/mL |
Each for $5,379.38
|
|
||||
|
09980178
|
Thermo Scientific™
PD1100 |
1.112 μm | 3 x 108 particles/mL |
Each for $799.47
|
|
||||
|
09980179
|
Thermo Scientific™
PD1100B |
1.112 μm | 1 x 10¹° particles/mL |
Each for $5,379.38
|
|
||||
|
09980157
|
Thermo Scientific™
PD125B |
0.126 μm | 1 x 10¹° particles/mL |
Each for $5,379.38
|
|
||||
|
09980158
|
Thermo Scientific™
PD155 |
0.155 μm | 3 x 108 particles/mL |
Each for $799.47
|
|
||||
|
09980159
|
Thermo Scientific™
PD155B |
0.155 μm | 1 x 10¹° particles/mL |
Each for $5,379.38
|
|
||||
|
09980162
|
Thermo Scientific™
PD200 |
0.202 μm | 3 x 108 particles/mL |
Each for $799.47
|
|
||||
|
09980181
|
Thermo Scientific™
PD2000 |
2.01 μm | 3 x 108 particles/mL |
Each for $799.47
|
|
||||
|
09980163
|
Thermo Scientific™
PD200B |
0.202 μm | 1 x 10¹° particles/mL |
Each for $5,379.38
|
|
||||
|
09980164
|
Thermo Scientific™
PD204 |
0.204 μm | 3 x 108 particles/mL |
Each for $799.47
|
|
||||
|
09980165
|
Thermo Scientific™
PD204B |
0.204 μm | 1 x 10¹° particles/mL |
Each for $5,379.38
|
|
||||
|
09980166
|
Thermo Scientific™
PD215 |
0.220 μm | 3 x 108 particles/mL |
Each for $799.47
|
|
||||
|
09980167
|
Thermo Scientific™
PD215B |
0.220 μm | 1 x 10¹° particles/mL |
Each for $5,379.38
|
|
||||
|
09-980-183
|
Thermo Scientific™
PD3000 |
3.04 μm | 3 x 108 particles/mL |
Each for $799.47
|
|
||||
|
09980168
|
Thermo Scientific™
PD305 |
0.304 μm | 3 x 108 particles/mL |
Each for $799.47
|
|
||||
|
09980169
|
Thermo Scientific™
PD305B |
0.304 μm | 1 x 10¹° particles/mL |
Each for $5,379.38
|
|
||||
|
09980170
|
Thermo Scientific™
PD365 |
0.360 μm | 3 x 108 particles/mL |
Each for $799.47
|
|
||||
|
09980171
|
Thermo Scientific™
PD365B |
0.360 μm | 1 x 10¹° particles/mL |
Each for $5,379.38
|
|
||||
|
09980172
|
Thermo Scientific™
PD500 |
0.498 μm | 3 x 108 particles/mL |
Each for $799.47
|
|
||||
|
09980173
|
Thermo Scientific™
PD500B |
0.498 μm | 1 x 10¹° particles/mL |
Each for $5,379.38
|
|
||||
|
09980174
|
Thermo Scientific™
PD800 |
0.809 μm | 3 x 108 particles/mL |
Each for $799.47
|
|
||||
|
09980175
|
Thermo Scientific™
PD800B |
0.809 μm | 1 x 10¹° particles/mL |
Each for $5,712.91
|
|
||||
|
09980176
|
Thermo Scientific™
PD802 |
0.802 μm | 3 x 108 particles/mL |
Each for $799.47
|
|
||||
|
09980177
|
Thermo Scientific™
PD802B |
0.802 μm | 1 x 10¹° particles/mL |
Each for $5,379.38
|
|
||||
Description
Simplify the preparation of calibration wafers with Thermo Scientific™ SURF-CAL™ Particle Size Standards, for calibration and maintenance of Scanning Surface Inspection Systems (SSIS). Available particle sizes correspond to the calibration point sizes required by instrument manufacturers.
Thermo Fisher Scientific™, along with the Semiconductor Industry and SEMI, have established specific particle sizes to be used when calibrating Scanning Surface Inspection Systems. Working with instrument manufacturers, we created the SURF-CAL™ product line to meet SEMI standard guidelines.- Available sizes are considered to be critical sizing nodes as defined by the International Technology Roadmap for Semiconductors (ITRS).
- By depositing SURF-CAL™ NIST™ traceable polystyrene latex spheres (PSL) on specially selected wafers, you can perform periodic calibration checks and compare your scanner with scanners at other locations.
- You can also assess the performance of your SSIS at critical stages in the manufacturing process.
- All products are suspended in deionized, filtered water in 50mL bottles at a concentration of 3 × 108 particles per mL.
Note:
Products PD1100 and smaller are also available at 1010 particles per mL for applications using the aid of a Differential Mobility Analyzer (DMA) or other size exclusionary techniques.
Specifications
| None | |
| Polystyrene microspheres in deionized, filtered water | |
| Polystyrene | |
| Certificate of Calibration and Traceability to NIST | |
| 50 mL | |
| Product stable for a minimum of 12 months |
| Unless otherwise stated, refrigerate (2° to 8°C) product when not in use but do not freeze. Store upright and keep bottle tightly sealed. Mix product with gentle inversion by hand or vortex mixer. | |
| SSIS Calibration and Maintenance | |
| Size Standard Particles | |
| 1.05g/cm³ | |
| 1.59 at 589nm (25°C) |