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Hexamethyldisilazane, Electronic grade, 99+%

CAS: 999-97-3 | C6H19NSi2 | 161.395 g/mol

$77.32 - $517.23

Chemical Identifiers

CAS 999-97-3
Molecular Formula C6H19NSi2
MDL Number MFCD00008259
InChI Key FFUAGWLWBBFQJT-UHFFFAOYSA-N
Synonym hexamethyldisilazane, bis trimethylsilyl amine, hmds, 1,1,1,3,3,3-hexamethyldisilazane, hexamethylsilazane, silanamine, 1,1,1-trimethyl-n-trimethylsilyl, tri-sil, 1,1,1-trimethyl-n-trimethylsilyl silanamine, hexamethyldisilizane, disilazane, 1,1,1,3,3,3-hexamethyl
PubChem CID 13838
ChEBI CHEBI:85068
IUPAC Name [dimethyl-(trimethylsilylamino)silyl]methane
SMILES C[Si](C)(C)N[Si](C)(C)C
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Products 3
Catalog Number Mfr. No. Quantity Price Quantity  
Catalog Number Mfr. No. Quantity Price Quantity  
AAL16519AC
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Thermo Scientific Chemicals
L16519AC
25 mL
Each for $77.32
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AAL16519AE
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Thermo Scientific Chemicals
L16519AE
100 mL
Each for $167.88
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AAL16519AP
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Thermo Scientific Chemicals
L16519AP
500 mL
Each for $517.23
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Description

Description

Hexamethyldisilazane is used as a solvent in organic synthesis and organometallic chemistry. It is often used as an adhesion promoter for photoresist in photolithography. Further, it is used for the preparation of trimethylsilyl ethers from hydroxy compounds. It is used as an alternative to critical point drying during sample preparation in electron microscopy. It is added to analyte to get silylated diagnostic products during pyrolysis in gas chromatography- mass spectrometry.

This Thermo Scientific Chemicals brand product was originally part of the Alfa Aesar product portfolio. Some documentation and label information may refer to the legacy brand. The original Alfa Aesar product / item code or SKU reference has not changed as a part of the brand transition to Thermo Scientific Chemicals.

Applications
Hexamethyldisilazane is used as a solvent in organic synthesis and organometallic chemistry. It is often used as an adhesion promoter for photoresist in photolithography. Further, it is used for the preparation of trimethylsilyl ethers from hydroxy compounds. It is used as an alternative to critical point drying during sample preparation in electron microscopy. It is added to analyte to get silylated diagnostic products during pyrolysis in gas chromatography- mass spectrometry.

Solubility
Miscible with methanol, ethyl ether, chloroform and benzene. Immiscible with water.

Notes
Incompatible with strong oxidizing agents and strong acids.  
Specifications

Chemical Identifiers

999-97-3
MFCD00008259
hexamethyldisilazane, bis trimethylsilyl amine, hmds, 1,1,1,3,3,3-hexamethyldisilazane, hexamethylsilazane, silanamine, 1,1,1-trimethyl-n-trimethylsilyl, tri-sil, 1,1,1-trimethyl-n-trimethylsilyl silanamine, hexamethyldisilizane, disilazane, 1,1,1,3,3,3-hexamethyl
CHEBI:85068
C[Si](C)(C)N[Si](C)(C)C
C6H19NSi2
FFUAGWLWBBFQJT-UHFFFAOYSA-N
13838
[dimethyl-(trimethylsilylamino)silyl]methane

Specifications

126°C
999-97-3
C6H19NSi2
MFCD00008259
635752
14,4689
Miscible with methanol,ethyl ether,chloroform and benzene. Immiscible with water.
C[Si](C)(C)N[Si](C)(C)C
161.395
CHEBI:85068
≥99%
Odorless
Moisture sensitive
Hexamethyldisilazane
-78°C
25 mL
(CH3)3SiNHSi(CH3)3
UN3286
8°C (46°F)
hexamethyldisilazane, bis trimethylsilyl amine, hmds, 1,1,1,3,3,3-hexamethyldisilazane, hexamethylsilazane, silanamine, 1,1,1-trimethyl-n-trimethylsilyl, tri-sil, 1,1,1-trimethyl-n-trimethylsilyl silanamine, hexamethyldisilizane, disilazane, 1,1,1,3,3,3-hexamethyl
FFUAGWLWBBFQJT-UHFFFAOYSA-N
[dimethyl-(trimethylsilylamino)silyl]methane
13838
161.4
Electronic
1.408
0.774
Videos
Safety and Handling

Safety and Handling

GHS H Statement
H225-H311-H331-H314-H318-H302
Highly flammable liquid and vapor.
Toxic in contact with skin.
Toxic if inhaled.
Causes severe skin burns and eye damage.
Causes serious eye damage.
Harmful if swallowed.

P210-P233-P235-P240-P241-P242-P243-P260-P264b-P270-P271-P280-P303+P361+P353-P304+P340-P305+P351+P338-P310-P330-P331-P363-P370+P378q-P501c

H225-H302+H332-H311-H314-H335

DOTInformation : Transport Hazard Class: 3; Packing Group: II; Proper Shipping Name: FLAMMABLE LIQUID, TOXIC, CORROSIVE, N.O.S.

EINECSNumber : 213-668-5

RTECSNumber : JM9230000

TSCA : Yes

Recommended Storage : Ambient temperatures; Store under Nitrogen

SDS
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RUO – Research Use Only